Process monitoring and control of low temperature reactively sputtered AlN
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Published in Thin solid films (02.11.1998)
Published in Thin solid films (02.11.1998)
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DISPLAY DEVICE COMPRISING GUIDE WITH REFLECTIVE COATINGS
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Year of Publication 03.10.2024
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DISPLAY DEVICE COMPRISING GUIDE WITH REFLECTIVE COATINGS
IAZIKOV, Dmitri, MARTIN, Tony, GREINER, Christoph, HERRIT, Gary L, POND, Brad, BARBAROSSA, Giovanni, KIRKPATRICK, Scott R
Year of Publication 02.10.2024
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Year of Publication 02.10.2024
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