Selective wet etching of Si3N4/SiO2 in phosphoric acid with the addition of fluoride and silicic compounds
Seo, Dongwan, Bae, Jin Sung, Oh, Eunseok, Kim, Solbaro, Lim, Sangwoo
Published in Microelectronic engineering (25.04.2014)
Published in Microelectronic engineering (25.04.2014)
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Journal Article
Effect of energetic electron beam treatment on transparent conductive ZnO thin films
Park, Chanhyoung, Kim, Solbaro, Kim, Changheon, Jeong, Chaehwan, Lim, Sangwoo
Published in Thin solid films (02.12.2013)
Published in Thin solid films (02.12.2013)
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Journal Article
Effect of energetic electron beam treatment on Ga-doped ZnO thin films
Kim, Solbaro, Kim, Changheon, Jeong, Chaehwan, Lim, Sangwoo
Published in Current applied physics (01.06.2014)
Published in Current applied physics (01.06.2014)
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Journal Article
In-situ Surface Temperature Monitoring through Wafer Temperature Sensing and Heat Transfer Modeling for O2/N2 Plasma Process
Kim, Solbaro, Oh, Hyun-woo, Sim, Kwang-bo
Published in 2022 IEEE 2nd International Conference on Electronic Technology, Communication and Information (ICETCI) (27.05.2022)
Published in 2022 IEEE 2nd International Conference on Electronic Technology, Communication and Information (ICETCI) (27.05.2022)
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