Clean SiO2 atomic layer etching based on physisorption of high boiling point perfluorocarbon
Dain Sung, Tak, Hyunwoo, Kim, Heeju, Kim, Dongwoo, Kim, Kyongnam, Yeom, Geunyoung
Published in Nanoscale (07.08.2024)
Published in Nanoscale (07.08.2024)
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Journal Article
Clean SiO 2 atomic layer etching based on physisorption of high boiling point perfluorocarbon
Sung, Dain, Tak, Hyunwoo, Kim, Heeju, Kim, Dongwoo, Kim, Kyongnam, Yeom, Geunyoung
Published in Nanoscale (07.08.2024)
Published in Nanoscale (07.08.2024)
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Journal Article
Adsorption and Recovery using Vaporization of Liquid Fluorocarbon Precursor
Park, Junyoung, Oh, Byoungmoon, Kim, Kyongnam
Published in Korean Journal of Metals and Materials (05.06.2020)
Published in Korean Journal of Metals and Materials (05.06.2020)
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Journal Article
Controlled Layer-by-Layer Etching of MoS2
Lin, TaiZhe, Kang, BaoTao, Jeon, MinHwan, Huffman, Craig, Jeon, JeaHoo, Lee, SungJoo, Han, Wei, Lee, JinYong, Lee, SeHan, Yeom, GeunYoung, Kim, KyongNam
Published in ACS applied materials & interfaces (29.07.2015)
Published in ACS applied materials & interfaces (29.07.2015)
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Journal Article
Improvement of a block co-polymer (PS-b-PMMA)-masked silicon etch profile using a neutral beam
Yun, Deokhyun, Park, Jinwoo, Kim, Hwasung, Mun, Jeongho, Kim, Sangouk, Kim, Kyongnam, Yeom, Geunyoung
Published in Nanotechnology (23.09.2016)
Published in Nanotechnology (23.09.2016)
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Journal Article
Controlled Layer-by-Layer Etching of MoS 2
Lin, TaiZhe, Kang, BaoTao, Jeon, MinHwan, Huffman, Craig, Jeon, JeaHoo, Lee, SungJoo, Han, Wei, Lee, JinYong, Lee, SeHan, Yeom, GeunYoung, Kim, KyongNam
Published in ACS applied materials & interfaces (29.07.2015)
Published in ACS applied materials & interfaces (29.07.2015)
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Journal Article
Controlled Layer-by-Layer Etching of MoS
Lin, TaiZhe, Kang, BaoTao, Jeon, MinHwan, Huffman, Craig, Jeon, JeaHoo, Lee, SungJoo, Han, Wei, Lee, JinYong, Lee, SeHan, Yeom, GeunYoung, Kim, KyongNam
Published in ACS applied materials & interfaces (29.07.2015)
Published in ACS applied materials & interfaces (29.07.2015)
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Journal Article
Growth, Yield and Grain Quality affected by Seeding Rates and Fertilizing Combinations in Spring-sown Jinyangbori
Kim Dae-Ho, Kim Su-Kyeong Kyongnam Agricultural Research and Extension Services, Chinju (Korea Republic)
Published in Korean journal of crop science (2000)
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Published in Korean journal of crop science (2000)
Journal Article