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RYU CHANG GIL, JANG YOUNG SEOK, KOO JA EUNG, SONG HYEON DONG, HONG JIN SUK, KIM KUEN BYUL, NA JEONG MIN, LEE EUN SEOK
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Year of Publication 13.07.2020
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A FLEXIBLE MEMBRANE FOR POLISHING HEAD
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Year of Publication 03.12.2013
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Apparatus for treating a substrate
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Year of Publication 21.04.2004
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Polishing pad conditioning apparatus
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Year of Publication 16.05.2023
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POLISHING PAD CONDITIONING APPARATUS
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Year of Publication 02.07.2020
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Year of Publication 02.07.2020
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FLEXIBLE MEMBRANES FOR A POLISHING HEAD
KIM KUEN-BYUL, LEE JAEANG, JANG YOUNG-SEOK, HONG JIN-SUK, KIM JAE-SUN, KOH YOUNG-HO, LEE JAE-DONG, HEO MIN-SUNG
Year of Publication 28.11.2013
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Year of Publication 28.11.2013
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Method of drying an object and apparatus for performing the same
Kim, Kuen-Byul, Kim, In-Gi, Park, Dae-Bum, Ryu, Soung-Kil, Baek, Seung-Bu, Kim, Seo-Hyun
Year of Publication 06.03.2012
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Year of Publication 06.03.2012
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Method of drying an object and apparatus for performing the same
KIM KUEN-BYUL, KIM SEO-HYUN, KIM IN-GI, RYU SOUNG-KIL, PARK DAE-BUM, BAEK SEUNG-BU
Year of Publication 06.03.2012
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Year of Publication 06.03.2012
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Method of drying an object and apparatus for performing the same
KIM KUEN-BYUL, KIM SEO-HYUN, KIM IN-GI, RYU SOUNG-KIL, PARK DAE-BUM, BAEK SEUNG-BU
Year of Publication 31.01.2008
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Year of Publication 31.01.2008
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METHOD OF DRYING AN OBJECT AND APPARATUS FOR PERFORMING THE SAME
KIM, KUEN BYUL, PARK, DAE BUM, KIM, SEO HYUN, KIM, IN GI, RYU, SOUNG KIL, BAEK, SEUNG BU
Year of Publication 21.12.2007
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Year of Publication 21.12.2007
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APPARATUS FOR DRYING A SUBSTRATE
KIM, KUEN BYUL, LEE, IL SANG, HWANG, IN SEAK, CHUNG, DAE HYUK, KIM, KYOUNG HWAN, KIM, IN GI
Year of Publication 28.11.2006
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Year of Publication 28.11.2006
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