인-시튜 원자층 증착 프로세스
KIM JONATHAN SUNGEHUL, LUERE OLIVIER, PARK SANG WOOK, SRINIVASAN SUNIL, YU LIN, YAO ZHONGHUA, CUI XIAORUI, DHINDSA RAJINDER
Year of Publication 31.12.2021
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Year of Publication 31.12.2021
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In-situ deposition process
Yu, Lin, Park, Sang Wook, Luere, Olivier, Kim, Jonathan Sungehul, Yao, Zhonghua, Srinivasan, Sunil, Dhindsa, Rajinder
Year of Publication 06.12.2022
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Year of Publication 06.12.2022
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IN-SITU ATOMIC LAYER DEPOSITION PROCESS
PARK, Sang Wook, YAO, Zhonghua, LUERE, Olivier, DHINDSA, Rajinder, YU, Lin, KIM, Jonathan Sungehul, CUI, Xiaorui, SRINIVASAN, Sunil
Year of Publication 26.11.2020
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Year of Publication 26.11.2020
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Method of enhanced selectivity of hard mask using plasma treatments
Lee, Chain, Sun, Hui, Lee, Yangchung, Kim, Jonathan Sungehul, Zhou, Hailong
Year of Publication 03.12.2019
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Year of Publication 03.12.2019
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IN-SITU DEPOSITION PROCESS
PARK, Sang Wook, YAO, Zhonghua, LUERE, Olivier, DHINDSA, Rajinder, KIM, Jonathan Sungehul, YU, Lin, SRINIVASAN, Sunil
Year of Publication 23.01.2020
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Year of Publication 23.01.2020
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METHOD OF ENHANCED SELECTIVITY OF HARD MASK USING PLASMA TREATMENTS
ZHOU, Hailong, KIM, Jonathan Sungehul, LEE, Chain, LEE, Yangchung, SUN, Hui
Year of Publication 07.02.2019
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Year of Publication 07.02.2019
Patent
IN-SITU ATOMIC LAYER DEPOSITION PROCESS
KIM JONATHAN SUNGEHUL, LUERE OLIVIER, PARK SANG WOOK, SRINIVASAN SUNIL, YU LIN, YAO ZHONGHUA, CUI XIAORUI, DHINDSA RAJINDER
Year of Publication 07.01.2022
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Year of Publication 07.01.2022
Patent
In-situ atomic layer deposition process
SRINIVASAN, SUNIL, DHINDSA, RAJINDER, YU, LIN, YAO, ZHONGHUA, PARK, SANG-WOOK, KIM, JONATHAN SUNGEHUL, CUI, XIAO-RUI, LUERE, OLIVIER
Year of Publication 01.12.2020
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Year of Publication 01.12.2020
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