The Impact of Dislocation on Bulk -Si FinFET Technologies: Physical Modeling of Strain Relaxation and Enhancement by Dislocation
Min, Jeong Guk, Jeong, Changwook, Kwon, Uihui, Kim, Dae Sin, Kim, Suhyun, Kim, Ilryoung, Yang, Joon-Sung
Published in 2018 IEEE 13th Nanotechnology Materials and Devices Conference (NMDC) (01.10.2018)
Published in 2018 IEEE 13th Nanotechnology Materials and Devices Conference (NMDC) (01.10.2018)
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