Development of Virtual Metrology Using Plasma Information Variables to Predict Si Etch Profile Processed by SF6/O2/Ar Capacitively Coupled Plasma
Kwon, Ji-Won, Ryu, Sangwon, Park, Jihoon, Lee, Haneul, Jang, Yunchang, Park, Seolhye, Kim, Gon-Ho
Published in Materials (01.06.2021)
Published in Materials (01.06.2021)
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Journal Article
2022 Review of Data-Driven Plasma Science
Anirudh, Rushil, Archibald, Rick, Asif, M. Salman, Becker, Markus M., Benkadda, Sadruddin, Bremer, Peer-Timo, Bude, Rick H. S., Chang, C. S., Chen, Lei, Churchill, R. M., Citrin, Jonathan, Gaffney, Jim A., Gainaru, Ana, Gekelman, Walter, Gibbs, Tom, Hamaguchi, Satoshi, Hill, Christian, Humbird, Kelli, Jalas, Soren, Kawaguchi, Satoru, Kim, Gon-Ho, Kirchen, Manuel, Klasky, Scott, Kline, John L., Krushelnick, Karl, Kustowski, Bogdan, Lapenta, Giovanni, Li, Wenting, Ma, Tammy, Mason, Nigel J., Mesbah, Ali, Michoski, Craig, Munson, Todd, Murakami, Izumi, Najm, Habib N., Olofsson, K. Erik J., Park, Seolhye, Peterson, J. Luc, Probst, Michael, Pugmire, David, Sammuli, Brian, Sawlani, Kapil, Scheinker, Alexander, Schissel, David P., Shalloo, Rob J., Shinagawa, Jun, Seong, Jaegu, Spears, Brian K., Tennyson, Jonathan, Thiagarajan, Jayaraman, Ticos, Catalin M., Trieschmann, Jan, van Dijk, Jan, Van Essen, Brian, Ventzek, Peter, Wang, Haimin, Wang, Jason T. L., Wang, Zhehui, Wende, Kristian, Xu, Xueqiao, Yamada, Hiroshi, Yokoyama, Tatsuya, Zhang, Xinhua
Published in IEEE transactions on plasma science (01.07.2023)
Published in IEEE transactions on plasma science (01.07.2023)
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Development of model predictive control of fluorine density in SF6/O2/Ar etch plasma by oxygen flow rate
Ryu, Sangwon, Kwon, Ji-Won, Park, Jihoon, Lee, Ingyu, Park, Seolhye, Kim, Gon-Ho
Published in Current applied physics (01.04.2022)
Published in Current applied physics (01.04.2022)
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Journal Article
Development of the Virtual Metrology for the Nitride Thickness in Multi-Layer Plasma-Enhanced Chemical Vapor Deposition Using Plasma-Information Variables
Roh, Hyun-Joon, Ryu, Sangwon, Jang, Yunchang, Kim, Nam-Kyun, Jin, Younggil, Park, Seolhye, Kim, Gon-Ho
Published in IEEE transactions on semiconductor manufacturing (01.05.2018)
Published in IEEE transactions on semiconductor manufacturing (01.05.2018)
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Journal Article
Cause analysis of the faults in HARC etching processes by using the PI‐VM model for OLED display manufacturing
Park, Seolhye, Kyung, Yunyoung, Lee, Juyoung, Jang, Yongsuk, Cha, Taewon, Noh, Yeongil, Choi, Younghoon, Kim, Byungsoo, Cho, Taeyoung, Seo, Rabul, Yang, Jae‐Ho, Jang, Yunchang, Ryu, Sangwon, Kim, Gon‐Ho
Published in Plasma processes and polymers (01.09.2019)
Published in Plasma processes and polymers (01.09.2019)
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Journal Article
Plasma information-based virtual metrology (PI-VM) and mass production process control
Park, Seolhye, Seong, Jaegu, Jang, Yunchang, Roh, Hyun-Joon, Kwon, Ji-Won, Lee, Jinyoung, Ryu, Sangwon, Song, Jaemin, Roh, Ki-Baek, Noh, Yeongil, Park, Yoona, Jang, Yongsuk, Cho, Taeyoung, Yang, Jae-Ho, Kim, Gon-Ho
Published in Journal of the Korean Physical Society (01.04.2022)
Published in Journal of the Korean Physical Society (01.04.2022)
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Journal Article
Enhancement of the Virtual Metrology Performance for Plasma-Assisted Oxide Etching Processes by Using Plasma Information (PI) Parameters
Park, Seolhye, Jeong, Sangmin, Jang, Yunchang, Ryu, Sangwon, Roh, Hyun-Joon, Kim, Gon-Ho
Published in IEEE transactions on semiconductor manufacturing (01.08.2015)
Published in IEEE transactions on semiconductor manufacturing (01.08.2015)
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Journal Article
Population Kinetics Modeling of Low-Temperature Argon Plasma
Chung, Hyun-Kyung, Song, Mi-Young, Kwon, Ji-Won, Lee, Myeong-Geon, Park, Jihoon, Bae, Namjae, Song, Jeamin, Kim, Gon-Ho, Dipti, Ralchenko, Yuri
Published in Atoms (01.12.2021)
Published in Atoms (01.12.2021)
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Journal Article
Development of plasma sources and diagnostics for the simulation of fusion edge plasmas
Woo, Hyun-Jong, Park, In Sun, Kang, In Je, Cho, Soon-Gook, Choi, Yong-Sup, Ahn, Jeong-Sun, Bae, Min-Keun, Chang, Doo-Hee, Choi, Geun-Sik, Choi, Heung-Gyun, Chung, Bo-Hyun, Chung, Tae Hoon, Do, Jeong-Joon, Goo, Bon-Cheol, Hong, Sung Hoon, Hong, Suk-Ho, Jeon, Jong-Sik, Joo, Sung-Kiu, Jung, Seo Jin, Jung, Seok-Won, Jung, Young-Dae, Jung, Yong Ho, Ko, Kwang-Cheol, Kim, Beom-Sik, Kim, Gon-Ho, Kim, Hye-Ran, Kim, Heung-Su, Kim, Jin-Hee, Kim, Jong-Il, Kim, Jae Yong, Kim, Kyung-Cheol, Kim, Myung Kyu, Kim, Sang-You, Kim, Jin-Woo, Kim, Yong-Kyun, Kwak, Gyea Young, Lee, Dong-Han, Lee, Heon-Ju, Lee, Min Ji, Lee, Myoung-Jae, Lee, Seung-Hwa, Lho, Taihyeop, Park, Eun-Kyung, Seok, Dong Chan, Lee, Byoung-Kyu, Noh, Seung Jeong, Seo, Young-Jun, Shim, Yun-Keun, Sun, Jong Ho, Oh, Byung-Hoon, Oh, Cha-Hwan, Oh, Hye Taek, Oh, Young-Suk, Park, Sang Joon, You, Hyun-Jong, Yoo, Hunsuk, Chung, Kyu-Sun
Published in Journal of the Korean Physical Society (01.04.2022)
Published in Journal of the Korean Physical Society (01.04.2022)
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Journal Article
Simulations of fusion edge plasmas by linear plasma devices: physics and plasma–material interactions
Kang, In Je, Bae, Min-Keun, Park, In Sun, Woo, Hyun-Jong, Lho, Taihyeop, Ahn, Jeong-Sun, Chang, Doo-Hee, Cho, Soon-Gook, Choi, Geun-Sik, Choi, Heung-Gyun, Choi, Yong-Sup, Chung, Bo-Hyun, Chung, Tae Hun, Do, Jeong-Joon, Goo, Bon-Cheol, Hong, Sung Hoon, Hong, Suk-Ho, Jeon, Jong-Sik, Joo, Sung-Kiu, Jung, Seo Jin, Jung, Seok-Won, Jung, Young-Dae, Jung, Yong Ho, Ko, Kwang-Cheol, Kim, Beom-Sik, Kim, Gon-Ho, Kim, Hye-Ran, Kim, Heung-Su, Kim, Jin-Hee, Kim, Jong-Il, Kim, Jae Yong, Kim, Kyung-Cheol, Kim, Myung Kyu, Kim, Sang-You, Kim, Jin-Woo, Kim, Yong-Kyun, Kwak, Gyea Young, Lee, Dong-Han, Lee, Heon-Ju, Lee, Min Ji, Lee, Myoung-Jae, Lee, Seung-Hwa, Park, Eun-Kyung, Seok, Dong Chan, Lee, Byoung-Kyu, Noh, Seung Jeong, Seo, Young-Jun, Shim, Yun-Keun, Sun, Jong Ho, Oh, Byung-Hoon, Oh, Cha-Hwan, Oh, Hye Taek, Oh, Young-Suk, Park, Sang Joon, You, Hyun Jong, You, Hun Suk, Chung, Kyu-Sun
Published in Journal of the Korean Physical Society (01.04.2022)
Published in Journal of the Korean Physical Society (01.04.2022)
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Journal Article
High-temperature thermo-mechanical behavior of functionally graded materials produced by plasma sprayed coating: Experimental and modeling results
Choi, Kang Hyun, Kim, Hyun-Su, Park, Chang Hyun, Kim, Gon-Ho, Baik, Kyoung Ho, Lee, Sung Ho, Kim, Taehyung, Kim, Hyoung Seop
Published in Metals and materials international (01.09.2016)
Published in Metals and materials international (01.09.2016)
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Determination of electron energy distribution function shape for non-Maxwellian plasmas using floating harmonics method
Huh, Sung-Ryul, Kim, Nam-Kyun, Roh, Hyun-Joon, Choi, Myung-Sun, Lee, Seok-Hwan, Kim, Gon-Ho
Published in Journal of physics. D, Applied physics (21.01.2015)
Published in Journal of physics. D, Applied physics (21.01.2015)
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Deposition/erosion and H/D retention characteristics in gaps of PFCs in KSTAR studied by cavity technique
Hong, Suk-Ho, Park, Sang-Joon, Choe, Jae-Myung, Jeon, Young-Mu, Yang, Seung Jae, Lim, Sun-Taek, Choi, Sooseok, Jin, Young-Gil, Park, Chong Rae, Kim, Gon-Ho
Published in Journal of nuclear materials (01.07.2013)
Published in Journal of nuclear materials (01.07.2013)
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Effects of metastable species in helium and argon atmospheric pressure plasma jets (APPJs) on inactivation of periodontopathogenic bacteria
Yoon, Sung-Young, Kim, Kyoung-Hwa, Seol, Yang-Jo, Kim, Su-Jeong, Bae, Byeongjun, Huh, Sung-Ryul, Kim, Gon-Ho
Published in Journal of the Korean Physical Society (01.05.2016)
Published in Journal of the Korean Physical Society (01.05.2016)
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Journal Article
Characteristics of OH Generation in Pin-to-Electrolyte Discharges
Yoon, Sung-Young, Kim, Su-Jeong, Hong, Young Ki, Lee, Sang-Heun, Kim, Gon-Ho
Published in IEEE transactions on plasma science (01.10.2014)
Published in IEEE transactions on plasma science (01.10.2014)
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Journal Article
Observation of oversaturation-induced defect formation in tungsten irradiated by low energy deuterium ion
Jin, Younggil, Song, Jae-Min, Roh, Ki-Baek, Kim, Nam-Kyun, Roh, Hyun-Joon, Jang, Yunchang, Ryu, Sangwon, Bae, Byeongjun, Kim, Gon-Ho
Published in Journal of the Korean Physical Society (01.08.2016)
Published in Journal of the Korean Physical Society (01.08.2016)
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