Plasma etching and surface characteristics depending on the crystallinity of the BaTiO3 thin film
Lee, Han Byeol, Joo, Young-Hee, Patil, Harshada, Kim, Gwan-Ha, Kang, Insu, Hou, Bo, Kim, Deok-kee, Um, Doo-Seung, Kim, Chang-Il
Published in Materials research express (01.01.2023)
Published in Materials research express (01.01.2023)
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Journal Article
Electrical Properties and Thermal Annealing Effects of Polycrystalline MoS2-MoSX Nanowalls Grown by Sputtering Deposition Method
Um, Doo-Seung, Jin, Mi-Jin, Woo, Jong-Chang, Kim, Dong-Pyo, Park, Jungmin, Jo, Younghun, Kim, Gwan-Ha
Published in Crystals (Basel) (01.04.2021)
Published in Crystals (Basel) (01.04.2021)
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Journal Article
Surface properties of Al-doped ZnO thin film before and after CF4/Ar plasma etching
JOO, Young-Hee, KIM, Gwan-Ha, UM, Doo-Seung, KIM, Chang-Il
Published in Plasma science & technology (01.07.2022)
Published in Plasma science & technology (01.07.2022)
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Journal Article
Threshold voltage shift of submicron p-channel MOSFET due to Si surface damage from plasma etching process
Kim, Gwan-Ha, Kang, Young-Rog, Kim, Whan-Jun, Kim, Sang-Yong, Kim, Chang-Il
Published in Thin solid films (23.04.2007)
Published in Thin solid films (23.04.2007)
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Journal Article
Conference Proceeding
Applicability of self-consistent global model for characterization of inductively coupled Cl2 plasma
Efremov, A.M., Kim, Gwan-Ha, Kim, Jong-Gyu, Bogomolov, A.V., Kim, Chang-Il
Published in Vacuum (01.01.2007)
Published in Vacuum (01.01.2007)
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Journal Article
Plasma etching of (Ba,Sr)TiO3 thin films using inductively coupled Cl2/Ar and BCl3/Cl2/Ar plasma
Kim, Gwan-Ha, Kim, Kyoung-Tae, Kim, Dong-Pyo, Kim, Chang-Il
Published in Thin solid films (22.03.2005)
Published in Thin solid films (22.03.2005)
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Journal Article
Controlling temperature dependence of silicon waveguide using slot structure
Lee, Jong-Moo, Kim, Duk-Jun, Kim, Gwan-Ha, Kwon, O-Kyun, Kim, Kap-Joong, Kim, Gyungock
Published in Optics express (04.02.2008)
Published in Optics express (04.02.2008)
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Journal Article
Characteristics of Nickel-doped Zinc Oxide thin films prepared by sol–gel method
Kim, Kyoung-Tae, Kim, Gwan-Ha, Woo, Jong-Chang, Kim, Chang-Il
Published in Surface & coatings technology (30.08.2008)
Published in Surface & coatings technology (30.08.2008)
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Journal Article
Conference Proceeding
Etch damage evaluation on (Bi4-xLax)Ti3O12 thin films during the etch process using inductively coupled plasma sources
KIM, Jong-Gyu, KIM, Gwan-Ha, KIM, Kyoung-Tae, KIM, Chang-Il
Published in Materials science in semiconductor processing (01.12.2006)
Published in Materials science in semiconductor processing (01.12.2006)
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Conference Proceeding
Journal Article
Effect of LaNiO3 electrode on microstructural and ferroelectric properties of Bi3.25Eu0.75Ti3O12 thin films
Kim, Kyoung-Tae, Kim, Chang-Il, Kim, Jong-Gyu, Kim, Gwan-Ha
Published in Thin solid films (31.07.2007)
Published in Thin solid films (31.07.2007)
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Journal Article
Dry etching of magnesium oxide thin films by using inductively coupled plasma for buffer layer of MFIS structure
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Journal Article
Conference Proceeding