Selective etching of silicon nitride over silicon oxide using ClF3/H2 remote plasma
Lee, Won Oh, Kim, Ki Hyun, Kim, Doo San, Ji, You Jin, Kang, Ji Eun, Tak, Hyun Woo, Park, Jin Woo, Song, Han Dock, Kim, Ki Seok, Cho, Byeong Ok, Kim, Young Lae, Yeom, Geun Young
Published in Scientific reports (05.04.2022)
Published in Scientific reports (05.04.2022)
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Journal Article
Plasma Induced Damage Reduction of Ultra Low-k Dielectric by Using Source Pulsed Plasma Etching for Next BEOL Interconnect Manufacturing
Jang, Jun Ki, Tak, Hyun Woo, Shin, Ye Ji, Kim, Doo San, Yeom, Geun Young
Published in IEEE transactions on semiconductor manufacturing (01.05.2020)
Published in IEEE transactions on semiconductor manufacturing (01.05.2020)
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Journal Article
Anisotropic atomic layer etching of W using fluorine radicals/oxygen ion beam
Kim, Doo San, Kim, Ju Eun, Lee, Won Oh, Park, Jin Woo, Gill, You Jung, Jeong, Byeong Hwa, Yeom, Geun Young
Published in Plasma processes and polymers (01.09.2019)
Published in Plasma processes and polymers (01.09.2019)
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Journal Article
Plasma atomic layer etching of ruthenium by oxygen adsorption-removal cyclic process
Kim, Doo San, Kwon, Hae In, Jang, Yun Jong, Kim, Gyoung Chan, Gil, Hong Seong, Kim, Dae Whan, Jeong, Byeong Hwa, Yeom, Geun Young
Published in Applied surface science (15.10.2024)
Published in Applied surface science (15.10.2024)
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Journal Article
Radical flux control in reactive ion beam etching (RIBE) by dual exhaust system
Kim, Doo San, Jang, Yun Jong, Kim, Ye Eun, Gil, Hong Seong, Kim, Hee Ju, Ji, You Jin, Kim, Hyung Yong, Kim, In Ho, Chae, Myoung Kwan, Park, Jong Chul, Yeom, Geun Young
Published in Applied surface science (01.01.2022)
Published in Applied surface science (01.01.2022)
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Journal Article
Atomic layer etching of chrome using ion beams
Park, Jin Woo, Kim, Doo San, Lee, Won Oh, Kim, Ju Eun, Yeom, Geun Young
Published in Nanotechnology (22.02.2019)
Published in Nanotechnology (22.02.2019)
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Journal Article
Selective isotropic etching of SiO2 over Si3N4 using NF3/H2 remote plasma and methanol vapor
Gil, Hong Seong, Kim, Doo San, Jang, Yun Jong, Kim, Dea Whan, Kwon, Hea In, Kim, Gyoung Chan, Kim, Dong Woo, Yeom, Geun Young
Published in Scientific reports (18.07.2023)
Published in Scientific reports (18.07.2023)
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Journal Article
Cyclic etching of silicon oxide using NF3/H2 remote plasma and NH3 gas flow
Gill, You Jung, Kim, Doo San, Gil, Hong Seong, Kim, Ki Hyun, Jang, Yun Jong, Kim, Ye Eun, Yeom, Geun Young
Published in Plasma processes and polymers (01.11.2021)
Published in Plasma processes and polymers (01.11.2021)
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Journal Article
Bond performance of reinforced concrete beams with electric arc furnace slag aggregates
Lee, Yong-Jun, Kim, Hyeong-Gook, Kim, Min-Jun, Kim, Dong-Hwan, Kim, Doo-San, Kim, Kil-Hee
Published in Construction & building materials (30.05.2020)
Published in Construction & building materials (30.05.2020)
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Journal Article
Reactive ion etching of an ovonic threshold switch (OTS) material using hydrogen-based plasmas for non-volatile phase change memories
Kim, Doo San, Kim, Ju Eun, Gill, You Jung, Park, Jin Woo, Jang, Yun Jong, Kim, Ye Eun, Choi, Hyejin, Kwon, Oik, Yeom, Geun Young
Published in RSC advances (01.10.2020)
Published in RSC advances (01.10.2020)
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Journal Article
Low temperature silicon nitride grown by very high frequency (VHF, 162MHz) plasma enhanced atomic layer deposition with floating multi-tile electrode
Ji, You Jin, Kim, Hae In, Kim, Ki Hyun, Kang, Ji Eun, Kim, Doo San, Kim, Ki Seok, Ellingboe, A.R., Kim, Dong Woo, Yeom, Geun Young
Published in Surfaces and interfaces (01.10.2022)
Published in Surfaces and interfaces (01.10.2022)
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Journal Article
Effects of Discontinuous Percoll Gradient Containing Alpha-linolenic Acid on Characteristics of Frozen-thawed Boar Spermatozoa
Kim, Doo-San, Hwangbo, Yong, Cheong, Hee-Tae, Park, Choon-Keun
Published in Journal of animal reproduction & biotechnology (Online) (31.03.2020)
Published in Journal of animal reproduction & biotechnology (Online) (31.03.2020)
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Journal Article
RF RF RF RF biased reactive ion beam etching apparatus and the method thereof
JANG YUN JONG, KWON HAE IN, GIL HONG SEONG, YEOM GEUN YOUNG, KIM DOO SAN, KIM YE EUN
Year of Publication 07.02.2024
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Year of Publication 07.02.2024
Patent
Method of atomic layer etching
JANG YUN JONG, KWON HAE IN, GIL HONG SEONG, YEOM GEUN YOUNG, KIM DOO SAN, KIM YE EUN, JUNG JI WON, CHUNG CHIN WOOK, PARK JUN YOUNG
Year of Publication 05.06.2024
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Year of Publication 05.06.2024
Patent