A Method for Defect Delineation in Silicon Carbide Using Potassium Hydroxide Vapor
Bondokov, Robert T., Khlebnikov, Igor I., Lashkov, Tsanko, Tupitsyn, Eugene, Stratiy, Georgiy, Khlebnikov, Yuri, Sudarshan, Tangali S.
Published in Japanese Journal of Applied Physics (2002)
Published in Japanese Journal of Applied Physics (2002)
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