Chemical vapor deposition of metal borides: 6. The formation of neodymium boride thin film materials from polyhedral boron clusters and metal halides by chemical vapor deposition
Kher, Shreyas S., Romero, Jennifer V., Caruso, John D., Spencer, James T.
Published in Applied organometallic chemistry (01.06.2008)
Published in Applied organometallic chemistry (01.06.2008)
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Journal Article
CHEMICAL VAPOR DEPOSITION OF METAL BORIDES: 7. THE RELATIVELY LOW TEMPERATURE FORMATION OF CRYSTALLINE LANTHANUM HEXABORIDE THIN FILMS FROM BORON HYDRIDE CLUSTER COMPOUNDS BY CHEMICAL VAPOR DEPOSITION
Kher, Shreyas S, Spencer, James T
Published in The Journal of physics and chemistry of solids (1998)
Published in The Journal of physics and chemistry of solids (1998)
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반도체 제조를 위한 생태 효율성 모니터링 및 탐색 플랫폼
MORADIAN ALA, NEVILLE ELIZABETH, MEIROVICH SERGEY, KHER SHREYAS SURESH, KELKAR UMESH MADHAV, TREJO ORLANDO, SHAH KARTIK B
Year of Publication 15.07.2024
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Year of Publication 15.07.2024
Patent
Synthesis of Nanocrystalline Indium Arsenide and Indium Phosphide from Indium(III) Halides and Tris(trimethylsilyl)pnicogens. Synthesis, Characterization, and Decomposition Behavior of I3In.cntdot.P(SiMe3)3
Wells, Richard L, Aubuchon, Steven R, Kher, Shreyas S, Lube, Michael S, White, Peter S
Published in Chemistry of materials (01.04.1995)
Published in Chemistry of materials (01.04.1995)
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Journal Article
Synthesis of nanocrystalline indium arsenide and indium phosphide from indium(III) halides and tris(trimethylsilyl)pnicogens. Synthesis, characterization, and decomposition behavior of I3In.P(SiMe3)3
WELLS, R. L, AUBUCHON, S. R, KHER, S. S, LUBE, M. S, WHITE, P. S
Published in Chemistry of materials (1995)
Published in Chemistry of materials (1995)
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Journal Article
Deposition and characterization of HfO 2 high k dielectric films
Lo, Wai, Kamath, Arvind, Kher, Shreyas, Metzner, Craig, Wen, Jianguo, Chen, Zhihao
Published in Journal of materials research (01.06.2004)
Published in Journal of materials research (01.06.2004)
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Journal Article
Deposition and characterization of HfO2 high k dielectric films
Lo, Wai, Kamath, Arvind, Kher, Shreyas, Metzner, Craig, Wen, Jianguo, Chen, Zhihao
Published in Journal of materials research (01.06.2004)
Published in Journal of materials research (01.06.2004)
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Journal Article
Development of 300mm MOCVD HfSiOx Process
Shi, Xiaoping, Schaekers, Marc, Date, Lucien, Rothschild, Aude, Everaert, Jean-Luc, Van Elshocht, Sven, Rosseel, Erik, Kher, Shreyas
Published in ECS transactions (20.10.2006)
Published in ECS transactions (20.10.2006)
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Journal Article
CHEMICAL VAPOR DEPOSITION OF METAL BORIDES
Kher, Shreyas S, Spencer, James T
Published in The Journal of physics and chemistry of solids (01.08.1998)
Published in The Journal of physics and chemistry of solids (01.08.1998)
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Journal Article