Search Results - "Kessels, M.V." :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Optical proximity correction for a versatile LCD based direct write maskless photoplotter

Optical proximity correction for a versatile LCD based direct write maskless photoplotter

by Kessels, M.V., Heggarty, K.
Published in Microelectronic engineering (01.12.2009)

Get full text

Journal Article

$Direct write of optical diffractive elements and planar waveguides with a digital micromirror device based UV photoplotter$

Direct write of optical diffractive elements and planar waveguides with a digital micromirror device based UV photoplotter

by Kessels, M.V., Nassour, C., Grosso, P., Heggarty, K.
Published in Optics communications (01.08.2010)

Get full text

Journal Article