Optical and electrical characteristics of plasma enhanced chemical vapor deposition boron carbonitride thin films derived from N-trimethylborazine precursor
Sulyaeva, Veronica S., Kosinova, Marina L., Rumyantsev, Yurii M., Kuznetsov, Fedor A., Kesler, Valerii G., Kirienko, Viktor V.
Published in Thin solid films (02.05.2014)
Published in Thin solid films (02.05.2014)
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