A Low-Power Low-Noise Dual-Chopper Amplifier for Capacitive CMOS-MEMS Accelerometers
Hongzhi Sun, Deyou Fang, Kemiao Jia, Maarouf, Fares, Hongwei Qu, Huikai Xie
Published in IEEE sensors journal (01.04.2011)
Published in IEEE sensors journal (01.04.2011)
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Journal Article
High-Fill-Factor Micromirror Array With Hidden Bimorph Actuators and Tip-Tilt-Piston Capability
Kemiao Jia, Samuelson, S R, Huikai Xie
Published in Journal of microelectromechanical systems (01.06.2011)
Published in Journal of microelectromechanical systems (01.06.2011)
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Journal Article
Silicon-on-insulator-based optical demultiplexer employing turning-mirror-integrated arrayed-waveguide grating
Kemiao Jia, Kemiao Jia, Wenhui Wang, Wenhui Wang, Yanzhe Tang, Yanzhe Tang, Yirong Yang, Yirong Yang, Jianyi Yang, Jianyi Yang, Xiaoqing Jiang, Xiaoqing Jiang, Yaming Wu, Yaming Wu, Minghua Wang, Minghua Wang, Yuelin Wang, Yuelin Wang
Published in IEEE photonics technology letters (01.02.2005)
Published in IEEE photonics technology letters (01.02.2005)
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Journal Article
A CMOS-MEMS Gyroscope Interface Circuit Design With High Gain and Low Temperature Dependence
Hongzhi Sun, Kemiao Jia, Xuesong Liu, Guizhen Yan, Yu-Wen Hsu, Fox, R. M., Huikai Xie
Published in IEEE sensors journal (01.11.2011)
Published in IEEE sensors journal (01.11.2011)
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Journal Article
A monolithic inertial measurement unit fabricated with improved DRIE post-CMOS process
Hongzhi Sun, Kemiao Jia, Yingtao Ding, Zhongyang Guo, Xuesong Liu, Guizhen Yan, Huikai Xie
Published in 2010 IEEE Sensors (01.11.2010)
Published in 2010 IEEE Sensors (01.11.2010)
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Conference Proceeding
Multi-Axis Electrothermal Scanning Micromirror with Low Driving Voltage
Kemiao Jia, Huikai Xie
Published in 2007 Conference on Lasers and Electro-Optics (CLEO) (01.05.2007)
Published in 2007 Conference on Lasers and Electro-Optics (CLEO) (01.05.2007)
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Conference Proceeding
A low temperature-dependence gain-boosting front-end amplifier for CMOS-MEMS gyroscopes
Hongzhi Sun, Kemiao Jia, Xuesong Liu, Guizhen Yan, Yu-Wen Hsu, Huikai Xie
Published in 2010 IEEE Sensors (01.11.2010)
Published in 2010 IEEE Sensors (01.11.2010)
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Conference Proceeding
A tip–tilt–piston micromirror with a double S-shaped unimorph piezoelectric actuator
Liu, Wenjing, Zhu, Yiping, Jia, Kemiao, Liao, Wenjun, Tang, Yongming, Wang, Baoping, Xie, Huikai
Published in Sensors and actuators. A. Physical. (15.04.2013)
Published in Sensors and actuators. A. Physical. (15.04.2013)
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Journal Article
A static capacitance probe structure for resolving the sidewall skew angle of Silicon Deep Reactive-Ion Etching
Kemiao Jia, Geisberger, Aaron, Dickens, Andrew, Steimle, Robert, Chang, David C., Winebarger, Paul, Lianjun Liu, McNeil, Andrew
Published in 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2014)
Published in 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2014)
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Conference Proceeding
Single-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures
Kemiao Jia, Samuelson, Sean R, Huikai Xie
Published in 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2010)
Published in 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2010)
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Conference Proceeding
A tipatiltapiston micromirror with a double S-shaped unimorph piezoelectric actuator
Liu, Wenjing, Zhu, Yiping, Jia, Kemiao, Liao, Wenjun, Tang, Yongming, Wang, Baoping, Xie, Huikai
Published in Sensors and actuators. A. Physical. (15.04.2013)
Published in Sensors and actuators. A. Physical. (15.04.2013)
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Journal Article
Multi-axis integrated CMOS-MEMS inertial sensors
Huikai Xie, Hongzhi Sun, Kemiao Jia, Deyou Fang, Hongwei Qu
Published in 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (01.11.2010)
Published in 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (01.11.2010)
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Conference Proceeding
An Electrothermal TipaTiltaPiston Micromirror Based on Folded Dual S-Shaped Bimorphs
Jia, Kemiao, Pal, S, Xie, Huikai
Published in Journal of microelectromechanical systems (01.01.2009)
Published in Journal of microelectromechanical systems (01.01.2009)
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Journal Article
An Electrothermal Micromirror with High Linear Scanning Efficiency
Pal, S., Kemiao Jia, Huikai Xie
Published in LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings (01.10.2007)
Published in LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings (01.10.2007)
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Conference Proceeding