EBSD measurement of strains in GaAs due to oxidation of buried AlGaAs layers
Keller, R.R, Roshko, A, Geiss, R.H, Bertness, K.A, Quinn, T.P
Published in Microelectronic engineering (01.07.2004)
Published in Microelectronic engineering (01.07.2004)
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Journal Article
Conference Proceeding
Strain-induced grain growth during rapid thermal cycling of aluminum interconnects
KELLER, R. R, GEISS, R. H, BARBOSA, N, SLIFKA, A. J, READ, D. T
Published in Metallurgical and materials transactions. A, Physical metallurgy and materials science (01.09.2007)
Published in Metallurgical and materials transactions. A, Physical metallurgy and materials science (01.09.2007)
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Conference Proceeding
Journal Article
Comparison of electrical and microtensile evaluations of mechanical properties of an aluminum film
BARBOSA, N, KELLER, R. R, READ, D. T, GEISS, R. H, VINCI, R. P
Published in Metallurgical and materials transactions. A, Physical metallurgy and materials science (01.09.2007)
Published in Metallurgical and materials transactions. A, Physical metallurgy and materials science (01.09.2007)
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Conference Proceeding
Journal Article