Stacked Ge-Nanosheet GAAFETs Fabricated by Ge/Si Multilayer Epitaxy
Chu, Chun-Lin, Wu, Kehuey, Luo, Guang-Li, Chen, Bo-Yuan, Chen, Shih-Hong, Wu, Wen-Fa, Yeh, Wen-Kuan
Published in IEEE electron device letters (01.08.2018)
Published in IEEE electron device letters (01.08.2018)
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Journal Article
The Impact of Junction Doping Distribution on Device Performance Variability and Reliability for Fully Depleted Silicon on Insulator With Thin Box Layer MOSFETs
Yeh, Wen-Kuan, Lin, Cheng-Li, Chou, Tung-Huan, Wu, Kehuey, Yuan, Jiann-Shiun
Published in IEEE transactions on nanotechnology (01.03.2015)
Published in IEEE transactions on nanotechnology (01.03.2015)
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Journal Article
Performance advantage and energy saving of triangular-shaped FinFETs
Kehuey Wu, Wei-Wen Ding, Meng-Hsueh Chiang
Published in 2013 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (01.09.2013)
Published in 2013 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (01.09.2013)
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Conference Proceeding
A novel bottom-up Ag contact (30nm diameter and 6.5 aspect ratio) technology by electroplating for 1Xnm and beyond technology
Chao-An Jong, Po-Jung Sung, Mei-Yi Lee, Fu-Ju Hou, Kehuey Wu, Ying-Hao Su, Bing-Mau Chen, Chia-Wei Ho, Ren-Jei Chung, Yao-Jen Lee, Wen-Fa Wu, Chenming Hu, Fu-Liang Yang
Published in 2011 International Electron Devices Meeting (01.12.2011)
Published in 2011 International Electron Devices Meeting (01.12.2011)
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Conference Proceeding
The Observation of Width Quantization Impact on Device Performance and Reliability for High-k/Metal Tri-Gate FinFET
Yeh, Wen-Kuan, Zhang, Wenqi, Yang, Yi-Lin, Dai, An-Ni, Wu, Kehuey, Chou, Tung-Huan, Lin, Cheng-Li, Gan, Kwang-Jow, Shih, Chia-Hung, Chen, Po-Ying
Published in IEEE transactions on device and materials reliability (01.12.2016)
Published in IEEE transactions on device and materials reliability (01.12.2016)
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Magazine Article
Stacked Ge Nanosheet GAAFETs Fabrication and Strain Effects Measurement
Chu, Chun-Lin, Luo, Guang-Li, Wu, Kehuey, Chen, Shih-Hong, Chen, Bo-Yuan, Wu, Wen-Fa, Yeh, Wen-Kuan
Published in 2020 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA) (01.08.2020)
Published in 2020 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA) (01.08.2020)
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Conference Proceeding
Enhanced Performance of Strained CMOSFETs Using Metallized Source/Drain Extension (M-SDE)
Chen, Hung-Wei, Ko, Chih-Hsin, Wang, Tzu-Juei, Ge, Chung-Hu, Wu, Kehuey, Lee, Wen-Chin
Published in 2007 IEEE Symposium on VLSI Technology (01.06.2007)
Published in 2007 IEEE Symposium on VLSI Technology (01.06.2007)
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Conference Proceeding
The GAAFETs with Five Stacked Ge Nano-sheets Made by 2D Ge/Si Multilayer Epitaxy, Excellent Selective Etching, and Conformal Monolayer Doping
Chu, Chun-Lin, Luo, Guang-Li, Wu, Kehuey, Chen, Shih-Hong, Hsu, Chien-Chung, Chen, Bo-Yuan, Lin, Kun-Lin, Wu, Wen-Fa, Yeh, Wen-Kuan
Published in 2019 Silicon Nanoelectronics Workshop (SNW) (01.06.2019)
Published in 2019 Silicon Nanoelectronics Workshop (SNW) (01.06.2019)
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Conference Proceeding