Accelerated corrosion and oxidation of tungsten plug during tungsten CMP
Kyungho Hwang, Keejoon Oh, Hyunghwan Kim, Nohjung Kwak
Published in 2015 International Conference on Planarization/CMP Technology (ICPT) (01.09.2015)
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Published in 2015 International Conference on Planarization/CMP Technology (ICPT) (01.09.2015)
Conference Proceeding