by Tsuda, Tomio, Inoue, Shinji, Kayahara, Akihiro, Imai, Shin-ichi, Tanaka, Tomoya, Sato, Naoaki, Yasuda, Satoshi
Published in IEEE transactions on semiconductor manufacturing (01.08.2015)

by Misaki, Makoto, Tsuda, Tomio, Inoue, Shinji, Sato, Shintaro, Kayahara, Akihiro, Imai, Shin-Ichi
Published in IEEE transactions on semiconductor manufacturing (01.11.2017)

by Sato, Shintaro, Kayahara, Akihiro, Imai, Shin-ichi
Published in 2016 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2016)

by Misaki, Makoto, Tsuda, Tomio, Inoue, Shinji, Sato, Shintaro, Kayahara, Akihiro, Imai, Shin-ichi
Published in 2016 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2016)

by TANIDA, HIROSHIY 18-24-105 URADOUHONNMACHI, KAWASHIMA, ISAMU 479 OHOAZA KAWANAMI, KAYAHARA, AKIHIRO 1-7 TOBUSHIO, YAMANISHI, YUYI 11-504 SHIMEIEN
Year of Publication 15.01.1992