Charged particle beam device having inspection scan direction based on scan with smaller dose
Kawano, Hajime, Shimizu, Kumiko, Itai, Hideki, Mori, Wataru, Hoque, Shahedul
Year of Publication 20.04.2021
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Year of Publication 20.04.2021
Patent
Thermoelectric field emission electron source and electron beam application device
Kasuya, Keigo, Doi, Takashi, Kawano, Hajime, Katagiri, Souichi, Matsunaga, Soichiro, Takei, Aki
Year of Publication 22.11.2022
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Year of Publication 22.11.2022
Patent
CHARGED PARTICLE BEAM DEVICE
SAKAKIBARA, Makoto, KAWANO, Hajime, TANIMOTO, Kenji, ENYAMA, Momoyo, SASAKI, Yuko, SUZUKI, Makoto
Year of Publication 10.11.2022
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Year of Publication 10.11.2022
Patent
Charged particle beam device and charged particle beam device noise source determination method
Kawano, Hajime, Nishimoto, Takuma, Takahashi, Hiroyuki, Mori, Wataru, Li, Wen
Year of Publication 06.10.2020
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Year of Publication 06.10.2020
Patent
CHARGED PARTICLE RAY DEVICE AND CROSS-SECTIONAL SHAPE ESTIMATION PROGRAM
KAWANO, Hajime, LEE, Chahn, YOKOSUKA, Toshiyuki, KUROSAWA, Kouichi, KAZUMI, Hideyuki
Year of Publication 17.09.2020
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Year of Publication 17.09.2020
Patent
CHARGED PARTICLE BEAM DEVICE AND OPERATION METHOD THEREFOR
WADA, Masashi, LI, Wen, KAWANO, Hajime, IKEDA, Kazuki, NAGASHIMA, Tomoharu
Year of Publication 16.06.2022
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Year of Publication 16.06.2022
Patent
Charged Particle Beam Device
SHIMIZU, Kumiko, KAWANO, Hajime, LEE, Chahn, TAKAHASHI, Hiroyuki, YOKOSUKA, Toshiyuki, KAZUMI, Hideyuki, HOQUE, Shahedul
Year of Publication 21.04.2022
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Year of Publication 21.04.2022
Patent
Measuring device and measuring method
Kawano, Hajime, Sakakibara, Makoto, Takahashi, Noritsugu, Sasaki, Yuko, Mori, Wataru
Year of Publication 07.07.2020
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Year of Publication 07.07.2020
Patent