Energy Quenching Effects on Dry-Etching Durability of Alicyclic-Aliphatic Copolymers and Polymer Blends Enhanced by Polymer-Chain Entanglement
Kushida, Masahito, Kawamoto, Kenryou, Harada, Kieko, Saito, Kyoichi, Sugita, Kazuyuki
Published in Japanese Journal of Applied Physics (01.03.2005)
Published in Japanese Journal of Applied Physics (01.03.2005)
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