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Year of Publication 15.09.2023
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Year of Publication 21.06.2024
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Year of Publication 06.12.2022
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Year of Publication 06.12.2022
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Year of Publication 12.03.2020
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Year of Publication 12.03.2020
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Year of Publication 20.01.2020
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Year of Publication 20.01.2020
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고 종횡비 패터닝 및 수직 스케일링을 위한 막 스택 단순화
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Year of Publication 22.04.2021
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Year of Publication 22.04.2021
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SELECTIVE PRECISION ETCHING OF SEMICONDUCTOR MATERIALS
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Year of Publication 07.09.2023
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Year of Publication 07.09.2023
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SELECTIVE SIGE ETCHING USING THERMAL F2 WITH ADDITIVE
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Year of Publication 22.02.2024
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Year of Publication 22.02.2024
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SELECTIVE OXIDE ETCH USING LIQUID PRECURSOR
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Year of Publication 19.10.2023
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Year of Publication 19.10.2023
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DUAL SENSOR WAFER TEMPERATURE MEASUREMENT SYSTEM
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Year of Publication 05.10.2023
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Year of Publication 05.10.2023
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SELECTIVE SILICON TRIM BY THERMAL ETCHING
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Year of Publication 24.08.2023
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Year of Publication 24.08.2023
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RAPID AND PRECISE TEMPERATURE CONTROL FOR THERMAL ETCHING
Zhu, Ji, Lavdovsky, Nathan, Berney, Butch, Kawaguchi, Mark Naoshi, Si, Hongbo
Year of Publication 27.04.2023
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Year of Publication 27.04.2023
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LIQUID-COOLED OPTICAL WINDOW FOR SEMICONDUCTOR PROCESSING CHAMBER
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Year of Publication 26.10.2023
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Year of Publication 26.10.2023
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SELECTIVE PRECISION ETCHING OF SEMICONDUCTOR MATERIALS
KAWAGUCHI, Mark Naoshi, MUI, David S. L, LAVOIE, Adrien, ZHU, Ji, MELAET, Gerome Michel Dominique, MUSSELWHITE, Nathan
Year of Publication 29.06.2023
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Year of Publication 29.06.2023
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IN SITU DECLOGGING IN PLASMA ETCHING
KAWAGUCHI, Mark Naoshi, ZHU, Ji, KAMARTHY, Gowri Channa, LIU, Wenchi, SUBRAMANIAN, Priyadarsini, MA, Qiang, SU, Xiaofeng, TAN, Zhongkui
Year of Publication 14.12.2023
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Year of Publication 14.12.2023
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SELECTIVE PRECISION ETCHING OF SEMICONDUCTOR MATERIALS
KAWAGUCHI, Mark Naoshi, LAVOIE, Adrien, ZHU, Ji, MELAET, Gerome Michel Dominique, MUSSELWHITE, Nathan, MUI, David
Year of Publication 07.10.2021
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Year of Publication 07.10.2021
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