Near-field interrogation of SAW resonators on rotating machinery
Boccard, J.-M, Katus, P, Renevier, R, Reindl, L. M, Friedt, J.-M
Published in Journal of sensors and sensor systems (17.09.2013)
Published in Journal of sensors and sensor systems (17.09.2013)
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Journal Article
Aluminium nitride membranes with embedded buried idt electrodes for novel flexural plate wave devices
Reusch, M., Katus, P., Holc, K., Pletschen, W., Kirste, L., Zuerbig, V., Iankov, D., Reindl, L., Ambacher, O., Lebedev, V.
Published in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2015)
Published in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2015)
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Conference Proceeding
Reduced order finite element models of Bulk Acoustic Wave Resonators
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Conference Proceeding
A novel self-heating paraffin membrane micro-actuator
Goldschmidtboing, F., Katus, P., Geipel, A., Woias, P.
Published in 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems (01.01.2008)
Published in 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems (01.01.2008)
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Conference Proceeding