Search Results - "Katata, Tomio" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

A Fully Integrated Aluminum Dual Damascene Process Using a New Double Stopper Structure

A Fully Integrated Aluminum Dual Damascene Process Using a New Double Stopper Structure

by Anand, Minakshisundaran B., Nakamura, Naofumi, Wada, Jun-ichi, Oikawa, Yasushi, Katata, Tomio, Shiba, Katsuyasu, Shibata, Hideki
Published in Japanese Journal of Applied Physics (01.10.1998)

Get full text

Journal Article

Hot Plate and Manufacturing Method of Semiconductor Device

Hot Plate and Manufacturing Method of Semiconductor Device

by KATATA TOMIO, WADA JUNICHI
Year of Publication 18.01.2002

Get full text

Patent

$Refractory Metal Electrodes and Interconnections in Si LSI$

Refractory Metal Electrodes and Interconnections in Si LSI

by SUGURO, Kyoichi, NAKASAKI, Yasushi, KATATA, Tomio
Published in Oyo Buturi (10.11.1990)

Get full text

Journal Article

Highly reliable CVD-WSi metal gate electrode for nMOSFETs

Highly reliable CVD-WSi metal gate electrode for nMOSFETs

by Nakajima, K., Nakazawa, H., Sekine, K., Matsuo, K., Saito, T., Katata, T., Suguro, K., Tsunashima, Y.
Published in IEEE transactions on electron devices (01.10.2005)

Get full text

Journal Article

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

by KATATA TOMIO
Year of Publication 01.05.2008

Get full text

Patent

Si LSIの高融点金属電極と配線

Si LSIの高融点金属電極と配線

by 須黒, 恭一, 中崎, 靖, 堅田, 富夫
Published in 応用物理 (1990)

Get full text

Journal Article

Filter, filtering frame, and semiconductor device manufacturing method and apparatus

Filter, filtering frame, and semiconductor device manufacturing method and apparatus

by KATATA TOMIO
Year of Publication 18.02.2003

Get full text

Patent

Filter, filtering frame, and semiconductor device manufacturing method and apparatus

Filter, filtering frame, and semiconductor device manufacturing method and apparatus

by Katata, Tomio
Year of Publication 18.02.2003

Get full text

Patent

Hot plate and method of manufacturing semiconductor device

Hot plate and method of manufacturing semiconductor device

by Katata, Tomio, Wada, Junichi
Year of Publication 31.12.2002

Get full text

Patent

Hot plate and method of manufacturing semiconductor device

Hot plate and method of manufacturing semiconductor device

by KATATA TOMIO, WADA JUNICHI
Year of Publication 31.12.2002

Get full text

Patent

Hot plate and manufacture method of semiconductor device

Hot plate and manufacture method of semiconductor device

by WADA, JUNICHI, KATATA, TOMIO
Year of Publication 11.08.2002

Get full text

Patent

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

by KATATA TOMIO, NAKAMURA SHUICHI, FUKUHARA JOTA
Year of Publication 03.01.2008

Get full text

Patent

Semiconductor device with electrode formed of conductive layer consisting of polysilicon layer and metal-silicide layer and its manufacturing method

Semiconductor device with electrode formed of conductive layer consisting of polysilicon layer and metal-silicide layer and its manufacturing method

by KATATA; TOMIO, OKUMURA; KATSUYA
Year of Publication 11.04.2000

Get full text

Patent

Semiconductor device having a ternary compound low resistive electrode

Semiconductor device having a ternary compound low resistive electrode

by KATATA; TOMIO, OKUMURA; KATSUYA
Year of Publication 14.12.1999

Get full text

Patent

Method and an apparatus for manufacturing a semiconductor device

Method and an apparatus for manufacturing a semiconductor device

by KATATA TOMIO, MURAKAMI KAZUHIRO, OMOTO SEIICHI
Year of Publication 07.07.2005

Get full text

Patent

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

by KATATA TOMIO, WADA JUNICHI, FUKUHARA JOTA, HATAZAKI AKITSUGU
Year of Publication 10.04.2008

Get full text

Patent

Semi-conductor and its producing method

Semi-conductor and its producing method

by KATATA TOMIO, NIGITA JUNICHI, IIKAWA OSAMU
Year of Publication 08.09.2004

Get full text

Patent

Semiconductor device and method of manufacturing the same

Semiconductor device and method of manufacturing the same

by KATATA TOMIO, WADA JUNICHI, OIKAWA YASUSHI
Year of Publication 27.07.2004

Get full text

Patent

Semiconductor device and method of manufacturing the same

Semiconductor device and method of manufacturing the same

by Oikawa, Yasushi, Wada, Junichi, Katata, Tomio
Year of Publication 27.07.2004

Get full text

Patent

Method of manufacturing semiconductor device having an aluminum wiring layer

Method of manufacturing semiconductor device having an aluminum wiring layer

by KATATA TOMIO, WADA JUNICHI, OIKAWA YASUSHI
Year of Publication 13.04.2004

Get full text

Patent