A MEMS electromagnetic optical scanner for a commercial confocal laser scanning microscope
Miyajima, H., Asaoka, N., Isokawa, T., Ogata, M., Aoki, Y., Imai, M., Fujimori, O., Katashiro, M., Matsumoto, K.
Published in Journal of microelectromechanical systems (01.06.2003)
Published in Journal of microelectromechanical systems (01.06.2003)
Get full text
Journal Article
MEMS optical scanners for microscopes
Miyajima, H., Murakami, K., Katashiro, M.
Published in IEEE journal of selected topics in quantum electronics (01.05.2004)
Published in IEEE journal of selected topics in quantum electronics (01.05.2004)
Get full text
Journal Article
A miniature confocal optical microscope with MEMS gimbal scanner
Murakami, K., Murata, A., Suga, T., Kitagawa, H., Kamiya, Y., Kubo, M., Matsumoto, K., Miyajima, H., Katashiro, M.
Published in TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) (2003)
Published in TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) (2003)
Get full text
Conference Proceeding
Product development of a MEMS optical scanner for a laser scanning microscope
Miyajima, H., Asaoka, N., Isokawa, T., Ogata, M., Aoki, Y., Imai, M., Fujimori, O., Katashiro, M., Matsumoto, K.
Published in Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) (2002)
Published in Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) (2002)
Get full text
Conference Proceeding
Analysis and application of hydrogen supplying process in metal-oxide-semiconductor structures
KATASHIRO, M, MATSUMOTO, K, OHTA, R
Published in Journal of the Electrochemical Society (01.11.1996)
Published in Journal of the Electrochemical Society (01.11.1996)
Get full text
Journal Article
A MEMS gimbal scanner for a miniature confocal microscope
Murakami, K., Kamiya, Y., Karatsu, K., Miyajima, H., Katashiro, M.
Published in IEEE/LEOS International Conference on Optical MEMs (2002)
Published in IEEE/LEOS International Conference on Optical MEMs (2002)
Get full text
Conference Proceeding