Emergence of distinct electronic states in epitaxially-fused PbSe quantum dot superlattices
Kavrik, Mahmut S, Hachtel, Jordan A, Ko, Wonhee, Qian, Caroline, Abelson, Alex, Unlu, Eyup B, Kashyap, Harshil, Li, An-Ping, Idrobo, Juan C, Law, Matt
Published in Nature communications (10.11.2022)
Published in Nature communications (10.11.2022)
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Journal Article
Author Correction: Emergence of distinct electronic states in epitaxially-fused PbSe quantum dot superlattices
Kavrik, Mahmut S, Hachtel, Jordan A, Ko, Wonhee, Qian, Caroline, Abelson, Alex, Unlu, Eyup B, Kashyap, Harshil, Li, An-Ping, Idrobo, Juan C, Law, Matt
Published in Nature communications (30.11.2022)
Published in Nature communications (30.11.2022)
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Journal Article
Interfacial Oxide Layer Scavenging in Ferroelectric Hf 0.5 Zr 0.5 O 2 -Based MOS Structures With Ge Channel for Reduced Write Voltages
Park, Chinsung, Kashyap, Harshil, Das, Dipjyoti, Hur, Jae, Tasneem, Nujhat, Lombardo, Sarah, Afroze, Nashrah, Chern, Winston, Kummel, Andrew C., Yu, Shimeng, Khan, Asif Islam
Published in IEEE transactions on electron devices (01.08.2023)
Published in IEEE transactions on electron devices (01.08.2023)
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Plasma enhanced atomic layer deposition of crystallized gallium phosphide on Si with tri-Ethylgallium and tri-tert-Butylphosphine
Yun, SeongUk, Kuo, Cheng-Hsuan, Lee, Ping-Che, Ueda, Scott T., Wang, Victor, Kashyap, Harshil, Mcleod, Aaron J., Zhang, Zichen, Winter, Charles H., Kummel, Andrew C.
Published in Applied surface science (15.05.2023)
Published in Applied surface science (15.05.2023)
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Journal Article
Interfacial Oxide Layer Scavenging in Ferroelectric Hf0.5Zr0.5O2-Based MOS Structures With Ge Channel for Reduced Write Voltages
Park, Chinsung, Kashyap, Harshil, Das, Dipjyoti, Hur, Jae, Tasneem, Nujhat, Lombardo, Sarah, Afroze, Nashrah, Chern, Winston, Kummel, Andrew C., Yu, Shimeng, Khan, Asif Islam
Published in IEEE transactions on electron devices (01.08.2023)
Published in IEEE transactions on electron devices (01.08.2023)
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Journal Article
Gallium phosphide conformal film growth on in-situ tri-TBP dry-cleaned InGaP/GaAs using atomic hydrogen ALD
Yun, SeongUk, Lee, Ping-Che, Kuo, Cheng-Hsuan, Mcleod, Aaron J., Zhang, Zichen, Wang, Victor, Huang, James, Kashyap, Harshil, Winter, Charles H., Kummel, Andrew C.
Published in Vacuum (01.02.2024)
Published in Vacuum (01.02.2024)
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Journal Article
Remote Oxygen Scavenging of the Interfacial Oxide Layer in Ferroelectric Hafnium–Zirconium Oxide-Based Metal–Oxide–Semiconductor Structures
Tasneem, Nujhat, Kashyap, Harshil, Chae, Kisung, Park, Chinsung, Lee, Ping-che, Lombardo, Sarah F, Afroze, Nashrah, Tian, Mengkun, Kumarasubramanian, Harish, Hur, Jae, Chen, Hang, Chern, Winston, Yu, Shimeng, Bandaru, Prabhakar, Ravichandran, Jayakanth, Cho, Kyeongjae, Kacher, Josh, Kummel, Andrew C., Khan, Asif Islam
Published in ACS applied materials & interfaces (28.09.2022)
Published in ACS applied materials & interfaces (28.09.2022)
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Sub-Nanometer Interfacial Oxides on Highly Oriented Pyrolytic Graphite and Carbon Nanotubes Enabled by Lateral Oxide Growth
Zhang, Zichen, Passlack, Matthias, Pitner, Gregory, Kuo, Cheng-Hsuan, Ueda, Scott T, Huang, James, Kashyap, Harshil, Wang, Victor, Spiegelman, Jacob, Lam, Kai-Tak, Liang, Yu-Chia, Liew, San Lin, Hsu, Chen-Feng, Kummel, Andrew C, Bandaru, Prabhakar
Published in ACS applied materials & interfaces (09.03.2022)
Published in ACS applied materials & interfaces (09.03.2022)
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Journal Article
Low-Resistivity Titanium Nitride Thin Films Fabricated by Atomic Layer Deposition with TiCl 4 and Metal–Organic Precursors in Horizontal Vias
Kuo, Cheng-Hsuan, Mcleod, Aaron J., Lee, Ping-Che, Huang, James, Kashyap, Harshil, Wang, Victor, Yun, SeongUK, Zhang, Zichen, Spiegelman, Jeffrey, Kanjolia, Ravindra, Moinpour, Mansour, Kummel, Andrew C.
Published in ACS applied electronic materials (22.08.2023)
Published in ACS applied electronic materials (22.08.2023)
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Journal Article
Low-Resistivity Titanium Nitride Thin Films Fabricated by Atomic Layer Deposition with TiCl4 and Metal–Organic Precursors in Horizontal Vias
Kuo, Cheng-Hsuan, Mcleod, Aaron J., Lee, Ping-Che, Huang, James, Kashyap, Harshil, Wang, Victor, Yun, SeongUK, Zhang, Zichen, Spiegelman, Jeffrey, Kanjolia, Ravindra, Moinpour, Mansour, Kummel, Andrew C.
Published in ACS applied electronic materials (22.08.2023)
Published in ACS applied electronic materials (22.08.2023)
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Journal Article
High Performance Transistor of Aligned Carbon Nanotubes in a Nanosheet Structure
Safron, Nathaniel, Chao, Tzu-Ang, Li, Shengman, Natani, Shreyam, Liew, San-Lin, Gilardi, Carlo, Chiu, Hsin-Yuan, Su, Sheng-Kai, Bechdolt, Andrew, Zeevi, Gilad, Zhang, Zichen, Passlack, Matthias, Hou, Vincent D.-H., Kashyap, Harshil, Chien, Chao-Hsin, Bandaru, Prabhakar, Kummel, Andrew, Wong, H.-S. Philip, Mitra, Subhasish, Pitner, Gregory, Radu, Iuliana
Published in 2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (16.06.2024)
Published in 2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (16.06.2024)
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Conference Proceeding
Ultra High-k HfZrO4 Thin Films Grown by Atomic Layer Deposition using Metal-Organic and Brute HOOH precursors
Kashyap, Harshil, Benham, Marshall, Spiegelman, Jeffrey, Kummel, Andrew
Published in 2023 International VLSI Symposium on Technology, Systems and Applications (VLSI-TSA/VLSI-DAT) (17.04.2023)
Published in 2023 International VLSI Symposium on Technology, Systems and Applications (VLSI-TSA/VLSI-DAT) (17.04.2023)
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Conference Proceeding
ULTRA HIGH-K HAFNIUM OXIDE AND HAFNIUM ZIRCONIUM OXIDE FILMS
Nemani, Srinivas, Yieh, Ellie, Kashyap, Harshil, Yadav, Ajay Kumar, Kummel, Andrew C, Wong, Keith T
Year of Publication 12.09.2024
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Year of Publication 12.09.2024
Patent
High-performance and low parasitic capacitance CNT MOSFET: 1.2 mA/μm at VDS of 0.75 V by self-aligned doping in sub-20 nm spacer
Li, Shengman, Chao, Tzu-Ang, Gilardi, Carlo, Safron, Nathaniel, Su, Sheng-Kai, Zeevi, Gilad, Bechdolt, Andrew Denis, Passlack, Matthias, Oberoi, Aaryan, Lin, Qing, Zhang, Ziehen, Wang, Kesong, Kashyap, Harshil, Liew, San-Lin, Hou, Vincent D.-H, Kummel, Andrew, Radu, Luliana, Pitner, Gregory, Wong, H.-S. Philip, Mitra, Subhasish
Published in 2023 International Electron Devices Meeting (IEDM) (09.12.2023)
Published in 2023 International Electron Devices Meeting (IEDM) (09.12.2023)
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Conference Proceeding