Diffusion and Segregation of Carbon in SiO 2 Films
Mizushima, Ichiro, Kamiya, Eiji, Arai, Norihisa, Sonoda, Masahisa, Yoshiki, Masahiko, Takagi, Shin-ichi, Wakamiya, Mikio, Kambayashi, Shigeru, Mikata, Yuichi, Kashiwagi, Sei-ichi Mori
Published in Japanese Journal of Applied Physics (01.03.1997)
Published in Japanese Journal of Applied Physics (01.03.1997)
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