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Towards a palladium micro-membrane for the water gas shift reaction: microfabrication approach and hydrogen purification results
by
Karnik
,
S.V
.
,
Hatalis, M.K.
,
Kothare, M.V.
Published in
Journal of microelectromechanical systems
(01.02.2003)
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Polysilicon diodes as temperature sensors for chemical microreaction systems
by
Karnik
,
S.V
.
,
Vo, H.X.
,
Hatalis, M.K.
,
Kothare, M.V.
Published in
2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497)
(2001)
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