Passive multiplexer test structure for fast and accurate contact and via fail-rate evaluation
Hess, C., Stine, B.E., Weiland, L.H., Mitchell, T., Karnett, M.P., Gardner, K.
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
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Journal Article
Conference Proceeding
Silicide-related yield enhancement in a deep submicrometer CMOS process
Qian, S., Solis, R., Haley, M., Pesnell, G., Mitchell, T., Butler, R., Ziger, D., Klatt, J., Delgado, M., Karnett, M.P., Davis, J.
Published in 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) (2001)
Published in 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) (2001)
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Conference Proceeding