A 3D micromechanical compass
Kyynäräinen, Jukka, Saarilahti, Jaakko, Kattelus, Hannu, Kärkkäinen, Anu, Meinander, Tor, Oja, Aarne, Pekko, Panu, Seppä, Heikki, Suhonen, Mika, Kuisma, Heikki, Ruotsalainen, Sami, Tilli, Markku
Published in Sensors and actuators. A. Physical. (10.04.2008)
Published in Sensors and actuators. A. Physical. (10.04.2008)
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Journal Article
Development of ScAlN PMUTs for Medical Applications
Karuthedath, Cyril Baby, Sebastian, Abhilash Thanniyil, Helisto, Panu, Sillanpaa, Teuvo, Karkkainen, Anu
Published in Journal of microelectromechanical systems (01.10.2023)
Published in Journal of microelectromechanical systems (01.10.2023)
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Journal Article
Digital Calibration Certificate in an industrial application
Nummiluikki, Juho, Saxholm, Sari, Kärkkäinen, Anu, Koskinen, Sami
Published in Acta IMEKO (01.01.2023)
Published in Acta IMEKO (01.01.2023)
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Journal Article
New MEMS Pressure Sensor Element and Concept for Coronary Catheter
Kärkkäinen, Anu, Saarilahti, Jaakko, Kyynäräinen, Jukka, Kuisma, Heikki
Published in Procedia engineering (2016)
Published in Procedia engineering (2016)
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Journal Article
Outgassing of Water Molecules During Silicon Fusion Bonding
Gao, Feng, Hokkanen, Ari, Pekko, Panu, Kärkkäinen, Anu, Kiihamäki, Jyrki
Published in Physics procedia (2012)
Published in Physics procedia (2012)
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Journal Article
Stability of Electrostatic Actuation of MEMS
Kärkkäinen, Anu, Oja, Aarne, Kyynäräinen, Jukka, Kuisma, Heikki, Seppä, Heikki
Published in Physica scripta (01.01.2004)
Published in Physica scripta (01.01.2004)
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Journal Article
3D flip chip packaging of MEMS sensor
Gadda, Akiko, Tuovinen, Reijo, Rimminen, Henry, Lalu, Sinikka, Saarilahti, Jaakko, Karkkainen, Anu
Published in Proceedings of the 5th Electronics System-integration Technology Conference (ESTC) (01.09.2014)
Published in Proceedings of the 5th Electronics System-integration Technology Conference (ESTC) (01.09.2014)
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Conference Proceeding
Microelectromechanical components in electrical metrology
Manninen, Antti, Karkkainen, Anu, Pesonen, Nadine, Oja, Aarne, Seppa, Heikki
Year of Publication 04.07.2007
Year of Publication 04.07.2007
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Journal Article
Demonstration of 50-Hz electrical active power measurement using a micromechanical magnetometer
Rimminen, H., Hallstrom, J., Immonen, P., Seppa, H., Manninen, A., Latonen, T., Kyynarainen, J., Karkkainen, A.
Published in 2012 Conference on Precision electromagnetic Measurements (01.07.2012)
Published in 2012 Conference on Precision electromagnetic Measurements (01.07.2012)
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Conference Proceeding
(Invited) Atomic Layer Deposition Coatings for Medical Devices
Blomberg, Tom, Ritasalo, Riina, Matvejeff, Mikko, Ylivaara, Oili, Kärkkäinen, Anu, Kivioja, Jani
Published in Meeting abstracts (Electrochemical Society) (01.09.2019)
Published in Meeting abstracts (Electrochemical Society) (01.09.2019)
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Journal Article
Microelectromechanical components in electrical metrology
Manninen, Antti, Karkkainen, Anu, Pesonen, Nadine, Oja, Aarne, Seppa, Heikki
Published in arXiv.org (04.07.2007)
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Published in arXiv.org (04.07.2007)
Paper
MEMS-based AC voltage reference
Karkkainen, A., Pesonen, N., Suhonen, M., Oja, A.S., Manninen, A., Tisnek, N., Seppa, H.
Published in IEEE transactions on instrumentation and measurement (01.04.2005)
Published in IEEE transactions on instrumentation and measurement (01.04.2005)
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Journal Article
Optimized design and process for making a DC voltage reference based on MEMS
Karkkainen, A., Awan, S.A., Kyynarainen, J., Pekko, P., Oja, A.S., Seppa, H.
Published in IEEE transactions on instrumentation and measurement (01.04.2005)
Published in IEEE transactions on instrumentation and measurement (01.04.2005)
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Journal Article
Stable SOI micromachined electrostatic AC voltage reference
KÄRKKÄINEN, Anu, PEKKO, Panu, DEKKER, James, PESONEN, Nadine, SUHONEN, Mika, OJA, Aarne, KYYNÄRÄINEN, Jukka, SEPPÄ, Heikki
Published in Microsystem technologies (01.12.2005)
Published in Microsystem technologies (01.12.2005)
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Conference Proceeding
Journal Article