Study of stress relaxation in implanted silicon on sapphire structures using Raman spectroscopy
Bolotov, V.V., Efremov, M.D., Karavaev, V.V., Volodin, V.A., Golomedov, A.V.
Published in Thin solid films (28.02.1992)
Published in Thin solid films (28.02.1992)
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