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Year of Publication 26.10.2023
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Chamber components with polished internal apertures
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CHAMBER COMPONENTS WITH POLISHED INTERNAL APERTURES
Firouzdor, Vahid, Koonce, David, Kanungo, Biraja Prasad, Sun, Jennifer Y
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Year of Publication 22.09.2022
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Chamber components with polished internal apertures
Firouzdor, Vahid, Koonce, David, Kanungo, Biraja Prasad, Sun, Jennifer Y
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Year of Publication 28.06.2022
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ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CHAMBER COMPONENTS
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Year of Publication 01.06.2023
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Ion beam sputtering with ion assisted deposition for coatings on chamber components
Firouzdor, Vahid, Zhang, Ying, Achutharaman, Vedapuram S, Kanungo, Biraja Prasad, Sun, Jennifer Y, Cho, Tom K
Year of Publication 31.01.2023
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Year of Publication 31.01.2023
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Ion beam sputtering with ion assisted deposition for coatings on chamber components
Firouzdor, Vahid, Zhang, Ying, Achutharaman, Vedapuram S, Kanungo, Biraja Prasad, Sun, Jennifer Y, Cho, Tom K
Year of Publication 31.01.2023
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Year of Publication 31.01.2023
Patent
Ion beam sputtering with ion assisted deposition for coatings on chamber components
Firouzdor, Vahid, Zhang, Ying, Achutharaman, Vedapuram S, Kanungo, Biraja Prasad, Sun, Jennifer Y, Cho, Tom K
Year of Publication 31.01.2023
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Year of Publication 31.01.2023
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