Computational Fluid Dynamics Modeling of Mono-Silane Siemens Reactor
Jung, Hosub, Park, Jong Hoon, Kang, Seung Oh, Jeong, Jong Hyun, Jeon, Soyoung, Jung, Jae Hak, Kim, Woo Kyoung
Published in Japanese Journal of Applied Physics (01.10.2012)
Published in Japanese Journal of Applied Physics (01.10.2012)
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Journal Article
Computational Fluid Dynamics Modeling of Mono-Silane Siemens Reactor
Jung, Hosub, Park, Jong Hoon, Kang, Seung Oh, Jeong, Jong Hyun, Jeon, Soyoung, Jung, Jae Hak, Kim, Woo Kyoung
Published in Japanese Journal of Applied Physics (01.10.2012)
Published in Japanese Journal of Applied Physics (01.10.2012)
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Journal Article
Gas Nozzle Effect on the Deposition of Polysilicon by Monosilane Siemens Reactor
Lee, Uk June, Kang, Seung Oh, Kim, Seung Hyun, You, Ho Jung, Park, Kun, Park, Sung Eun, Park, Jong Hoon
Published in International journal of photoenergy (01.01.2012)
Published in International journal of photoenergy (01.01.2012)
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Journal Article
POLY SILICON DEPOSITION DEVICE
KANG, SEUNG OH, LEE, UK JUNE, PARK, KUN, PARK, JONG HOON, PARK, SUNG EUN
Year of Publication 26.02.2013
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Year of Publication 26.02.2013
Patent
POLY SILICON DEPOSITION DEVICE
KANG, SEUNG OH, LEE, UK JUNE, PARK, KUN, PARK, JONG HOON, PARK, SUNG EUN
Year of Publication 26.02.2013
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Year of Publication 26.02.2013
Patent
CHEMICAL VAPOR DEPOSITION REACTOR FOR POLY-SILICON
KIM, SEUNG HYUN, PARK, KYU DONG, LEE, UK GI, KANG, SEUNG OH, JANG, KUM SANG, PARK, JONG HOON, LEE, CHANG RAE
Year of Publication 18.12.2013
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Year of Publication 18.12.2013
Patent
DEVICE FOR MANUFACTURING POLYSILICON
YOU, HO JUNG, KIM, SEUNG HYUN, KANG, SEUNG OH, PARK, KUN, LEE, CHANG RAE, PARK, GYU DONG, PARK, SUNG EUN
Year of Publication 05.07.2012
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Year of Publication 05.07.2012
Patent
POLY SILICON DEPOSITION DEVICE
YOU, HO JUNG, KANG, SEUNG OH, PARK, KUN, KIM, BO SUN, KIM, BOK SAENG, LEE, CHANG RAE, PARK, GYU DONG
Year of Publication 08.06.2011
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Year of Publication 08.06.2011
Patent