APPARATUS AND PROCESS FOR DEPOSITING A THIN LAYER OF RESIST ON A SUBSTRATE
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Year of Publication 14.07.2014
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METHODS AND APPARATI FOR HANDLING, HEATING AND COOLING A SUBSTRATE UPON WHICH A PATTERN IS MADE BY A TOOL IN HEAT FLOWABLE MATERIAL COATING, INCLUDING SUBSTRATE TRANSPORT, TOOL LAYDOWN, TOOL TENSIONING, AND TOOL RETRACTION
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Year of Publication 09.06.2014
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Year of Publication 09.06.2014
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APPARATUS AND PROCESS FOR DEPOSITING A THIN LAYER OF RESIST ON A SUBSTRATE
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Year of Publication 30.04.2021
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Year of Publication 30.04.2021
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APPARATUS AND PROCESS FOR DEPOSITING A THIN LAYER OF RESIST ON A SUBSTRATE
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Year of Publication 08.07.2020
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Methods and apparati for handling, heating and cooling a substrate upon which a pattern is made by a tool in heat flowable material coating, including substrate transport, tool laydown, tool tensioning and tool retraction
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Year of Publication 04.02.2020
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Apparatus for depositing a thin layer of polymer resist on a substrate
Kane Peter E, Tarasov Vladimir S, Sachs Emanuel M, Gates Holly G, Danner Guy M, Madden Peter G
Year of Publication 14.11.2017
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Year of Publication 14.11.2017
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APPARATUS AND PROCESS FOR DEPOSITING A THIN LAYER OF RESIST ON A SUBSTRATE
TARASOV, VLADIMIR, S, DANNER, GUY, M, KANE, PETER, E, MADDEN, PETER, G, SACHS, EMANUEL, M, GATES, HOLLY, G
Year of Publication 13.11.2015
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Year of Publication 13.11.2015
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APPARATUS AND PROCESS FOR DEPOSITING A THIN LAYER OF RESIST ON A SUBSTRATE
KANE, PETER E, DANNER, GUY M, SACHS, EMANUEL M, MADDEN, PETER G, GATES, HOLLY G, TARASOV, VLADIMIR S
Year of Publication 16.09.2015
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Year of Publication 16.09.2015
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METHODS AND APPARATI FOR HANDLING, HEATING AND COOLING A SUBSTRATE UPON WHICH A PATTERN IS MADE BY A TOOL IN HEAT FLOWABLE MATERIAL COATING, INCLUDING SUBSTRATE TRANSPORT, TOOL LAYDOWN, TOOL TENSIONING, AND TOOL RETRACTION
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Year of Publication 29.04.2015
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Year of Publication 29.04.2015
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METHODS AND APPARATI FOR HANDLING, HEATING AND COOLING A SUBSTRATE UPON WHICH A PATTERN IS MADE BY A TOOL IN HEAT FLOWABLE MATERIAL COATING, INCLUDING SUBSTRATE TRANSPORT, TOOL LAYDOWN, TOOL TENSIONING AND TOOL RETRACTION
GATES HOLLY G, SACHS EMANUEL M, INIRIO HECTOR A, KANE PETER E, POLITO BENJAMIN F, HARRIS DAMIAN W
Year of Publication 18.12.2014
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Year of Publication 18.12.2014
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Apparatus and Process for Depositing a Thin Layer of Resist on a Substrate
GATES HOLLY G, TARASOV VLADIMIR S, SACHS EMANUEL M, DANNER GUY M, KANE PETER E, MADDEN PETER G
Year of Publication 11.09.2014
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Year of Publication 11.09.2014
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APPARATUS AND PROCESS FOR DEPOSITING A THIN LAYER OF RESIST ON A SUBSTRATE
KANE, PETER E, DANNER, GUY M, SACHS, EMANUEL M, MADDEN, PETER G, GATES, HOLLY G, TARASOV, VLADIMIR S
Year of Publication 20.08.2014
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Year of Publication 20.08.2014
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METHODS AND APPARATI FOR HANDLING, HEATING AND COOLING A SUBSTRATE UPON WHICH A PATTERN IS MADE BY A TOOL IN HEAT FLOWABLE MATERIAL COATING, INCLUDING SUBSTRATE TRANSPORT, TOOL LAYDOWN, TOOL TENSIONING, AND TOOL RETRACTION
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Year of Publication 30.07.2014
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Year of Publication 30.07.2014
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APPARATUS AND PROCESS FOR DEPOSITING A THIN LAYER OF RESIST ON A SUBSTRATE
TARASOV, VLADIMIR, S, DANNER, GUY, M, KANE, PETER, E, MADDEN, PETER, G, SACHS, EMANUEL, M, GATES, HOLLY, G
Year of Publication 19.06.2014
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Year of Publication 19.06.2014
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APPARATUS AND PROCESS FOR DEPOSITING A THIN LAYER OF RESIST ON A SUBSTRATE
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Year of Publication 18.04.2013
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Year of Publication 18.04.2013
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METHODS AND APPARATI FOR HANDLING, HEATING AND COOLING A SUBSTRATE UPON WHICH A PATTERN IS MADE BY A TOOL IN HEAT FLOWABLE MATERIAL COATING, INCLUDING SUBSTRATE TRANSPORT, TOOL LAYDOWN, TOOL TENSIONING, AND TOOL RETRACTION
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Year of Publication 28.03.2013
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Year of Publication 28.03.2013
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Apparatus and process for depositing a thin layer of resist on a substrate
KANE, PETER E, DANNER, GUY M, SACHS, EMANUEL M, MADDEN, PETER G, GATES, HOLLY G, TARASOV, VLADIMIR S
Year of Publication 11.12.2017
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Year of Publication 11.12.2017
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Methods and apparati for handling, heating and cooling a substrate upon which a pattern is made by a tool in heat flowable material coating, including substrate transport, tool laydown, tool tensioning, and tool retraction
KANE, PETER E, POLITO, BENJAMIN F, SACHS, EMANUEL M, INIRIO, HECTOR A, GATES, HOLLY G, HARRIS, DAMIAN W
Year of Publication 21.03.2017
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Year of Publication 21.03.2017
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