Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography
Vakarin, Vladyslav, Melati, Daniele, Dinh, Thi Thuy Duong, Le Roux, Xavier, Kan, Warren Kut King, Dupré, Cécilia, Szelag, Bertrand, Monfray, Stéphane, Boeuf, Frédéric, Cheben, Pavel, Cassan, Eric, Marris-Morini, Delphine, Vivien, Laurent, Alonso-Ramos, Carlos Alberto
Published in Nanomaterials (Basel, Switzerland) (01.11.2021)
Published in Nanomaterials (Basel, Switzerland) (01.11.2021)
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Journal Article
2x2 Ultra-Broadband Multimode Interference Coupler with Subwavelength Gratings Fabricated by Immersion Lithography
Kan, Warren Kut King, Toxqui-Rodriguez, Sara, Medina-Quiroz, David, Nuno-Ruano, Paula, Melati, Daniele, Cassan, Eric, Marris-Morini, Delphine, Vivien, Laurent, Cheben, Pavel, Adelmini, Laeticia, Fowler, Daivid, Alonso-Ramos, Carlos
Published in 2023 Photonics North (PN) (12.06.2023)
Published in 2023 Photonics North (PN) (12.06.2023)
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Conference Proceeding