Vth control by halo implantation using the SEN's MIND system
Ninomiya, S., Kimura, Y., Kudo, T., Ochi, A., Sato, F., Tsukihara, M., Fuse, G., Sugitani, M., Tada, K., Kamiyanagi, H., Shibata, S.
Published in 2009 International Workshop on Junction Technology (01.06.2009)
Published in 2009 International Workshop on Junction Technology (01.06.2009)
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