Using a wedge oxide to monitor low energy beam purity by means of therma-wave measurements in the Eaton NV-8200P ion implanter
Kamenitsa, Dennis E., Pearce, N.O.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.03.1995)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.03.1995)
Get full text
Journal Article