원자 알루미늄 이온을 생성하기 위한 고체 요오드화 알루미늄(ALI3)을 사용하는 주입 및 요오드화 알루미늄과 관련된 부산물의 현장 세정
BERINGER JASON, WU XIANGYANG, RZESZUT RICHARD, SILVA FERNANDO, KAMENITSA DENNIS
Year of Publication 05.03.2019
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Year of Publication 05.03.2019
Patent
Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products
Wu, Xiangyang, Beringer, Jason R, Kamenitsa, Dennis Elliott, Silva, Fernando M, Rzeszut, Richard J
Year of Publication 15.09.2020
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Year of Publication 15.09.2020
Patent
Using a wedge oxide to monitor low energy beam purity by means of therma-wave measurements in the Eaton NV-8200P ion implanter
Kamenitsa, Dennis E., Pearce, N.O.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.03.1995)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.03.1995)
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Journal Article
Use of the temperature dependence of the therma-wave technique as a thermometer
Rathmell, Robert D., Kamenitsa, Dennis, Brubaker, Steve, Reece, Ron, Pearce, N.O.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.1995)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.1995)
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Journal Article