Three-dimensional doping and diffusion in nano scaled devices as studied by atom probe tomography
Kambham, Ajay Kumar, Kumar, Arul, Florakis, Antonios, Vandervorst, Wilfried
Published in Nanotechnology (12.07.2013)
Published in Nanotechnology (12.07.2013)
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Journal Article
3D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomography
Kambham, Ajay Kumar, Kumar, Arul, Gilbert, Matthieu, Vandervorst, Wilfried
Published in Ultramicroscopy (01.09.2013)
Published in Ultramicroscopy (01.09.2013)
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Journal Article
Dopant/carrier profiling for 3D-structures
Vandervorst, Wilfried, Schulze, Andreas, Kambham, Ajay Kumar, Mody, Jay, Gilbert, Matthieu, Eyben, Pierre
Published in Physica status solidi. C (01.01.2014)
Published in Physica status solidi. C (01.01.2014)
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Journal Article
Application of Atom Probe on Fully Depleted Silicon-On-Insulator (FDSOI) Structures
Kambham, Ajay Kumar, Flatoff, Dan, Fu, Bianzhu
Published in Microscopy and microanalysis (01.07.2016)
Published in Microscopy and microanalysis (01.07.2016)
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Journal Article
Atomic insight into Ge1−xSnx using atom probe tomography
Kumar, Arul, Komalan, Manu P., Lenka, Haraprasanna, Kambham, Ajay Kumar, Gilbert, Matthieu, Gencarelli, Federica, Vincent, Benjamin, Vandervorst, Wilfried
Published in Ultramicroscopy (01.09.2013)
Published in Ultramicroscopy (01.09.2013)
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Journal Article
Characteristics of cross-sectional atom probe analysis on semiconductor structures
Koelling, S., Innocenti, N., Hellings, G., Gilbert, M., Kambham, A.K., De Meyer, K., Vandervorst, W.
Published in Ultramicroscopy (01.05.2011)
Published in Ultramicroscopy (01.05.2011)
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Journal Article
Atom Probe Tomography for 3D-dopant analysis in FinFET devices
Kambham, A. K., Zschaetzsch, G., Sasaki, Y., Togo, M., Horiguchi, N., Mody, J., Florakis, A., Gajula, D. R., Kumar, A., Gilbert, M., Vandervorst, W.
Published in 2012 Symposium on VLSI Technology (VLSIT) (01.06.2012)
Published in 2012 Symposium on VLSI Technology (VLSIT) (01.06.2012)
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Conference Proceeding
Atom-Probe-Tomographic Studies on Silicon-Based Semiconductor Devices
Inoue, Koji, Kambham, Ajay Kumar, Mangelinck, Dominique, Lawrence, Dan, Larson, David J.
Published in Microscopy today (01.09.2012)
Published in Microscopy today (01.09.2012)
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Magazine Article
Three-Dimensional Dopant/Carrier Profiling
Vandervorst, Wilfried, Schulze, A., Kambham, Ajay Kumar, Mody, J., Gilbert, M., Eyben, P.
Published in Meeting abstracts (Electrochemical Society) (08.03.2013)
Published in Meeting abstracts (Electrochemical Society) (08.03.2013)
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Journal Article
Advantages and Challenges of 3-D Atom Probe Tomography Characterization of FinFETs
Martin, Andrew J., Kambham, Ajay Kumar, Katnani, Ahmad D.
Published in Electronic device failure analysis (01.05.2017)
Published in Electronic device failure analysis (01.05.2017)
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Magazine Article