내장형 RF 차폐부를 갖는 반도체 기판 지지부들
LUBOMIRSKY DMITRY, CHO JAEYONG, GRACE MICHAEL, PARK SOONAM, KALNIN NIKOLAI, KALUARACHCHI DON CHANNA K, BENJAMINSON DAVID
Year of Publication 23.04.2021
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Year of Publication 23.04.2021
Patent
플라즈마 균일성의 방사상 및 방위각 제어를 위한 시스템들 및 방법들
TRAN TOAN, KOBAYASHI SATORU, LUBOMIRSKY DMITRY, SUGAI HIDEO, PARK SOONAM, KALNIN NIKOLAI
Year of Publication 11.09.2019
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Year of Publication 11.09.2019
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SYSTEMS AND PROCESSES FOR PLASMA FILTERING
LUBOMIRSKY DMITRY, PARK SOONAM, TRAN TOAN Q, KALNIN NIKOLAI, DEVARAKONDA AKHIL
Year of Publication 03.05.2019
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Year of Publication 03.05.2019
Patent
Demonstration of Intra-Data Center Link Based on 1x4 Multicore Fiber (MCF) Edge-Coupled to Silicon Photonics
Butler, Doug, Schlepple, Norbert, Ten, Sergey, Sutton, Cliff, Bennett, Kevin, Tuggle, Matthew, Lorenzo, Marc, Clark, Jeff, Tandon, Pushkar, Zakharian, Aramais, Artuso, Anthony, Rao, Vasanta, Chen, Dingchuan, Kalnin, Nikolai, Tummidi, Ravi, Tsai, Nadine, Bullock, Bob, Cervasio, Alberto, Peternel, Joyce, Traverso, Matt
Published in 2021 European Conference on Optical Communication (ECOC) (13.09.2021)
Published in 2021 European Conference on Optical Communication (ECOC) (13.09.2021)
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Conference Proceeding
Semiconductor substrate supports with embedded RF shield
Lubomirsky, Dmitry, Benjaminson, David, Grace, Michael, Kalnin, Nikolai, Cho, Jaeyong, Kaluarachchi, Don Channa K, Park, Soonam
Year of Publication 29.06.2021
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Year of Publication 29.06.2021
Patent
Systems and methods for radial and azimuthal control of plasma uniformity
Lubomirsky, Dmitry, Tran, Toan, Kalnin, Nikolai, Kobayashi, Satoru, Park, Soonam, Sugai, Hideo
Year of Publication 26.01.2021
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Year of Publication 26.01.2021
Patent
SEMICONDUCTOR SUBSTRATE SUPPORTS WITH EMBEDDED RF SHIELD
KALNIN, Nikolai, KALUARACHCHI, Don Channa K, CHO, Jaeyong, GRACE, Michael, BENJAMINSON, David, LUBOMIRSKY, Dmitry, PARK, Soonam
Year of Publication 19.03.2020
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Year of Publication 19.03.2020
Patent
SEMICONDUCTOR SUBSTRATE SUPPORTS WITH EMBEDDED RF SHIELD
Lubomirsky, Dmitry, Benjaminson, David, Grace, Michael, Kalnin, Nikolai, Cho, Jaeyong, Kaluarachchi, Don Channa K, Park, Soonam
Year of Publication 19.03.2020
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Year of Publication 19.03.2020
Patent
SYSTEMS AND METHODS FOR RADIAL AND AZIMUTHAL CONTROL OF PLASMA UNIFORMITY
Lubomirsky, Dmitry, Tran, Toan, Kalnin, Nikolai, Kobayashi, Satoru, Park, Soonam, Sugai, Hideo
Year of Publication 28.11.2019
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Year of Publication 28.11.2019
Patent
Systems and methods for radial and azimuthal control of plasma uniformity
Lubomirsky, Dmitry, Tran, Toan, Kalnin, Nikolai, Kobayashi, Satoru, Park, Soonam, Sugai, Hideo
Year of Publication 01.10.2019
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Year of Publication 01.10.2019
Patent
SYSTEMS AND PROCESSES FOR PLASMA FILTERING
Lubomirsky, Dmitry, Kalnin, Nikolai, Devarakonda, Akhil, Park, Soonam, Tran, Toan Q
Year of Publication 25.04.2019
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Year of Publication 25.04.2019
Patent