Micro-structured electron accelerator for the mobile gas ionization sensor technology
Zimmer, C M, Kallis, K T, Giebel, F J
Published in Journal of sensors and sensor systems (01.01.2015)
Published in Journal of sensors and sensor systems (01.01.2015)
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Journal Article
Wafer Extension for Cost-Effective Front to Back Side Alignment
Kolander, K., Kallis, K.T., Brabender, S., Fiedler, H.L.
Published in Journal of nano research (01.03.2014)
Published in Journal of nano research (01.03.2014)
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Journal Article
Design, simulation, fabrication and characterization of nano-scaled acceleration grids
Kallis, K.T., Dietz, D., Subasi, E., Müller, M.R., Kontis, C., Zimmer, C.M.
Published in Microelectronic engineering (01.06.2014)
Published in Microelectronic engineering (01.06.2014)
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Journal Article
Preparation of nanoscale thermal time of flight sensors by e-beam lithography
Kallis, K.T., Vendt, V.V., Küchenmeister, C., Fiedler, H.L.
Published in Microelectronic engineering (01.09.2012)
Published in Microelectronic engineering (01.09.2012)
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Journal Article
Nano-fin based mercury-sensor for environmental surveillance
Keller, L O, Kallis, K T, Fiedler, H L
Published in Journal of nanoscience and nanotechnology (01.09.2010)
Published in Journal of nanoscience and nanotechnology (01.09.2010)
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Journal Article
Creating a Monocrystalline Membrane via Etching and Sealing of Nanoholes Considering its Sealing Behavior
Fiedler, H.L., Ebschke, S., Poloczek, R.R., Kallis, Klaus T.
Published in Journal of nano research (01.10.2013)
Published in Journal of nano research (01.10.2013)
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Journal Article
Lithography independent high accuracy fabrication and characterization of next generation Nano-MOS-transistors with L = 25 nm and W = 75 nm
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Journal Article
Conference Proceeding
Planar technology integration of monocrystalline Silicon-membranes using nanoholes
Ebschke, S., Poloczek, R. R., Kallis, K. T., Fiedler, H. L.
Published in 2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) (01.08.2013)
Published in 2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) (01.08.2013)
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Conference Proceeding
Journal Article
Fabricating freely suspended structures optimized regarding mechanical and electrochemical stability for sensor applications
Giebel, F.J., Köhle, M., Czyba, P., Kolander, K.J., Kallis, K.T., Zimmer, C.M., Fiedler, H.L.
Published in Microelectronic engineering (15.06.2016)
Published in Microelectronic engineering (15.06.2016)
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Journal Article
Optimizing the identification of mono- and bilayer graphene on multilayer substrates
Kontis, Christopher, Mueller, Marcel R, Kuechenmeister, Christian, Kallis, Klaus T, Knoch, Joachim
Published in Applied optics. Optical technology and biomedical optics (20.01.2012)
Published in Applied optics. Optical technology and biomedical optics (20.01.2012)
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Journal Article
Test environment for characterization of a nanoscale sensor system consisting of fluid flow sensors based on the Thermal-Time-of-Flight (TToF) principle and absolute pressure sensors
Ebschke, S., Zimmermann, J., Wiggershaus, A., Kallis, K. T., Fiedler, H. L.
Published in IEEE SENSORS 2014 Proceedings (01.11.2014)
Published in IEEE SENSORS 2014 Proceedings (01.11.2014)
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Conference Proceeding
A monocrystalline absolute pressure sensor with a pseudo-MOSFET read-out device for life-science applications
Ebschke, S., Poloczek, R. R., Kallis, K. T., Fiedler, H. L.
Published in 2013 IEEE SENSORS (01.11.2013)
Published in 2013 IEEE SENSORS (01.11.2013)
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Conference Proceeding
Lithography independent nanostructuring of Bi2Te3 thermoelectric devices
Merten, D., Kallis, K. T., Giebel, F. J., Zimmermann, J., Poloczek, R.P., Fiedler, H. L., Lilienthal, P.
Published in 2017 14th IEEE India Council International Conference (INDICON) (01.12.2017)
Published in 2017 14th IEEE India Council International Conference (INDICON) (01.12.2017)
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Conference Proceeding