Plasma-activated direct bonding of coated optical glasses
Birckigt, P., Rothhardt, C., Grabowski, K., Jorke, K., Schlegel, R., Dreisow, F., Kalkowski, G., Risse, S., Eberhardt, R.
Published in Japanese Journal of Applied Physics (01.02.2020)
Published in Japanese Journal of Applied Physics (01.02.2020)
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Journal Article
Direct wafer bonding for encapsulation of fused silica optical gratings
Kalkowski, G., Zeitner, U., Benkenstein, T., Fuchs, J., Rothhardt, C., Eberhardt, R.
Published in Microelectronic engineering (01.09.2012)
Published in Microelectronic engineering (01.09.2012)
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Journal Article
Fused silica GRISMs manufactured by hydrophilic direct bonding at moderate heating
Kalkowski, G., Grabowski, K., Harnisch, G., Flügel-Paul, T., Zeitner, U., Risse, S.
Published in CEAS space journal (01.12.2017)
Published in CEAS space journal (01.12.2017)
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Journal Article
Electrostatic chucks for lithography applications
Kalkowski, G., Risse, S., Harnisch, G., Guyenot, V.
Published in Microelectronic engineering (01.09.2001)
Published in Microelectronic engineering (01.09.2001)
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Journal Article
Conference Proceeding
Electrostatic chuck behaviour at ambient conditions
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Journal Article
Conference Proceeding
CRYOGENIC DESIGN OF THE ALUHEAT PROJECT
Hiltunen, I, Stenvall, A, Korpela, A, Lehtonen, J, Mikkonen, R, Runde, M, Magnusson, N, Kalkowski, G
Published in Advances in Cryogenic Engineering; Volume 53B (01.01.2008)
Published in Advances in Cryogenic Engineering; Volume 53B (01.01.2008)
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Journal Article
Direct bonding for the encapsulation of transverse optical gratings
Kalkowski, Gerhard, Benkenstein, Tino, Rothhardt, Carolin, Fuchs, Frank, Zeitner, Uwe
Published in Microelectronic engineering (01.10.2013)
Published in Microelectronic engineering (01.10.2013)
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Journal Article
(Invited) Glass-Glass Direct Bonding
Kalkowski, Gerhard, Risse, Stefan, Zeitner, Uwe, Fuchs, Frank, Eberhardt, Ramona, Tünnermann, Andreas
Published in ECS transactions (14.08.2014)
Published in ECS transactions (14.08.2014)
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Journal Article
Glass Direct Bonding for Optical Applications
Kalkowski, Gerhard, Rothhardt, Carolin, Jobst, Paul-Johannes, Schürmann, Mark, Eberhardt, Ramona
Published in ECS transactions (15.03.2013)
Published in ECS transactions (15.03.2013)
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Journal Article
5f Localization in light actinide compounds studied by L3-edge X-ray absorption
KALKOWSKI, G, KAINDL, G, BERTRAM, S, SCHMIESTER, G, REBIZANT, J, SPIRLET, J. C, VOGT, O
Published in Solid state communications (01.10.1987)
Published in Solid state communications (01.10.1987)
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Journal Article
Screening channels in 4f photoemission from light rare earth compounds
Kalkowski, G, Sampathkumaran, E.V, Laubschat, C, Domke, M, Kaindl, G
Published in Solid state communications (01.01.1985)
Published in Solid state communications (01.01.1985)
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Journal Article
Direct Bonding of Glass Substrates
Kalkowski, Gerhard, Rohde, Mathias, Risse, Stefan, Eberhardt, Ramona, Tünnermann, Andreas
Published in ECS transactions (01.10.2010)
Published in ECS transactions (01.10.2010)
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Journal Article
4f mixing in ternary metallic cerium systems
Sampathkumaran, E.V., Kalkowski, G., Laubschat, C., Kaindl, G., Domke, M., Schmiester, G., Wortmann, G.
Published in Journal of magnetism and magnetic materials (01.01.1985)
Published in Journal of magnetism and magnetic materials (01.01.1985)
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Journal Article
Mean Valence from Mv excitations in TmxY1-xSe
Kalkowski, G., Brewer, W.D., Kaindl, G., Hotzberg, F.
Published in Journal of magnetism and magnetic materials (01.01.1985)
Published in Journal of magnetism and magnetic materials (01.01.1985)
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Journal Article
Near-edge x-ray-absorption fine structure in uranium compounds
Kalkowski, G, Kaindl, G, Brewer, WD, Krone, W
Published in Physical review. B, Condensed matter (15.02.1987)
Published in Physical review. B, Condensed matter (15.02.1987)
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Journal Article
4f-ligand hybridization in CeF4 and TbF4 probed by core-level spectroscopies
Kalkowski, G, Kaindl, G, Wortmann, G, Lentz, D, Krause, S
Published in Physical review. B, Condensed matter (15.01.1988)
Published in Physical review. B, Condensed matter (15.01.1988)
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Journal Article
Plasma-activated direct bonding of coated optical glasses
Birckigt, P., Rothhardt, C., Grabowski, K., Jorke, K., Schlegel, R., Dreisow, F., Kalkowski, G., Risse, S., Eberhardt, R.
Published in 2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) (01.05.2019)
Published in 2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) (01.05.2019)
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Conference Proceeding
Photoabsorption by the 3d shell in Ce, Pr, Ho, and Er: Observations and calculations
Sugar, J, Brewer, WD, Kalkowski, G, Kaindl, G, Paparazzo, E
Published in Physical review. A, General physics (01.10.1985)
Published in Physical review. A, General physics (01.10.1985)
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Journal Article