Investigation of origins of the critically different MOS interface characteristics between dry-oxidized and wet-oxidized silicon carbide
Kita, Koji, Hirai, Hirohisa, Kajifusa, Hiroyuki, Kuroyama, Kohei, Ishinoda, Kei
Published in Microelectronic engineering (25.06.2017)
Published in Microelectronic engineering (25.06.2017)
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