Advanced litho-cluster control via integrated in-chip metrology
Bhattacharyya, Kaustuve, Smilde, Henk-Jan H., den Boef, Arie, Fuchs, Andreas, Meyer, Steffen, Chih-Ming Ke, Guo-Tsai Huang, Kai-Hsiung Chen
Published in ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2013)
Published in ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2013)
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Conference Proceeding
Noise reduction for overlay control
Ke, Chih-Ming, Hu, Weimin, Chang, Yang-Hung, Chen, Kai-Hsiung, Hu, Chun-Ming
Year of Publication 29.11.2022
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Year of Publication 29.11.2022
Patent
Aperture design and methods thereof
Ke, Chih-Ming, Wu, Kai, Hsieh, Hung-Chih, Chen, Yen-Liang, Chen, Kai-Hsiung, Cheng, Po-Chung
Year of Publication 23.05.2023
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Year of Publication 23.05.2023
Patent
Spectroscopic overlay metrology
Ke, Chih-Ming, Wu, Kai, Hsieh, Hung-Chih, Chen, Yen-Liang, Chen, Kai-Hsiung
Year of Publication 20.04.2021
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Year of Publication 20.04.2021
Patent
Noise Reduction for Overlay Control
Ke, Chih-Ming, Hu, Weimin, Chang, Yang-Hung, Chen, Kai-Hsiung, Hu, Chun-Ming
Year of Publication 01.10.2020
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Year of Publication 01.10.2020
Patent
Noise reduction for overlay control
Ke, Chih-Ming, Hu, Weimin, Chang, Yang-Hung, Chen, Kai-Hsiung, Hu, Chun-Ming
Year of Publication 16.06.2020
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Year of Publication 16.06.2020
Patent
Aperture Design and Methods Thereof
Ke, Chih-Ming, Wu, Kai, Hsieh, Hung-Chih, Chen, Kai-Hsiung, Chen, Yem-Liang, Cheng, Po-Chung
Year of Publication 10.09.2020
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Year of Publication 10.09.2020
Patent
Noise Reduction for Overlay Control
Ke, Chih-Ming, Hu, Weimin, Chang, Yang-Hung, Chen, Kai-Hsiung, Hu, Chun-Ming
Year of Publication 22.08.2019
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Year of Publication 22.08.2019
Patent
Aperture design and methods thereof
Ke, Chih-Ming, Wu, Kai, Hsieh, Hung-Chih, Chen, Yen-Liang, Chen, Kai-Hsiung, Cheng, Po-Chung
Year of Publication 26.05.2020
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Year of Publication 26.05.2020
Patent
Noise reduction for overlay control
Ke, Chih-Ming, Hu, Weimin, Chang, Yang-Hung, Chen, Kai-Hsiung, Hu, Chun-Ming
Year of Publication 07.05.2019
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Year of Publication 07.05.2019
Patent