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Published in Journal of microelectromechanical systems (01.02.2018)
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TORKKELI, Altti, KAAJAKARI, Ville, FUKUMITSU, Masakazu, BLOMQVIST, Anssi
Year of Publication 09.03.2023
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Year of Publication 09.03.2023
Patent
Nonlinear limits for single-crystal silicon microresonators
Kaajakari, V., Mattila, T., Oja, A., Seppa, H.
Published in Journal of microelectromechanical systems (01.10.2004)
Published in Journal of microelectromechanical systems (01.10.2004)
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Journal Article