Various applications of resonant pressure sensor chip based on 3-D micromachining
Harada, Kinji, Ikeda, Kyoichi, Kuwayama, Hideki, Murayama, Hidekazu
Published in Sensors and actuators. A. Physical. (30.03.1999)
Published in Sensors and actuators. A. Physical. (30.03.1999)
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Journal Article
Vacuum-sealed silicon micromachined pressure sensors
Esashi, M., Sugiyama, S., Ikeda, K., Wang, Y., Miyashita, H.
Published in Proceedings of the IEEE (01.08.1998)
Published in Proceedings of the IEEE (01.08.1998)
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Journal Article