Developable bottom antireflective coating composition and pattern forming method using thereof
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Year of Publication 26.05.2015
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Year of Publication 26.05.2015
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DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITION AND PATTERN FORMING METHOD USING THEREOF
HUANG WU-SONG, LIU SEN, HOLMES STEVEN J, KWONG RANEE W, CHEN KUANG-JUNG
Year of Publication 19.02.2015
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Year of Publication 19.02.2015
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Interconnect structure with an oxygen-doped SiC antireflective coating and method of fabrication
SHOBHA HOSADURGA, GOLDFARB DARIO L, KWONG RANEE W, LIN QINGHUANG, NEUMAYER DEBORAH A
Year of Publication 12.02.2013
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Year of Publication 12.02.2013
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INTERCONNECT STRUCTURE WITH AN OXYGEN-DOPED SiC ANTIREFLECTIVE COATING AND METHOD OF FABRICATION
SHOBHA HOSADURGA, GOLDFARB DARIO L, KWONG RANEE W, LIN QINGHUANG, NEUMAYER DEBORAH A
Year of Publication 01.12.2011
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Year of Publication 01.12.2011
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LOW-ACTIVATION ENERGY SILICON-CONTAINING RESIST SYSTEM
KWONG, RANEE, W, ALLEN, ROBERT, D, HUANG, WU-SONG, SOORIYAKUMARAN, RATNAM, ANGELOPOULOS, MARIE
Year of Publication 13.01.2010
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Year of Publication 13.01.2010
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Low-activation energy silicon-containing resist system
HUANG WU-SONG,ALLEN ROBERT D.,ANGELOPOULOS MARIE,KWONG RANEE W.,SOORIYAKUMARAN RATNAM
Year of Publication 29.11.2006
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Year of Publication 29.11.2006
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LOW-ACTIVATION ENERGY SILICON-CONTAINING RESIST SYSTEM
ALLEN ROBERT D, KWONG RANEE W, SOORIYAKUMARAN RATNAM, ANGELOPOULOS MARIE, HUANG WU SONG
Year of Publication 09.08.2006
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Year of Publication 09.08.2006
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Organometallic polymers and use thereof
Angelopoulos, Marie, Aviram, Ari, Guarnieri, C. Richard, Kwong, Ranee W
Year of Publication 01.10.2002
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Year of Publication 01.10.2002
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LOW-ACTIVATION ENERGY SILICON-CONTAINING RESIST SYSTEM
KWONG, RANEE, W, ALLEN, ROBERT, D, HUANG, WU-SONG, SOORIYAKUMARAN, RATNAM, ANGELOPOULOS, MARIE
Year of Publication 12.07.2006
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Year of Publication 12.07.2006
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Bottom antireflective coating composition and method for use thereof
LI WENJIE, VARANASI PUSHKARA R, PATEL KAUSHAL, KHOJASTEH MAHMOUD, KWONG RANEE W, CHEN KUANG-JUNG J
Year of Publication 04.10.2007
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Year of Publication 04.10.2007
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LOW-ACTIVATION ENERGY SILICON-CONTAINING RESIST SYSTEM
KWONG, RANEE, W, ALLEN, ROBERT, D, HUANG, WU-SONG, SOORIYAKUMARAN, RATNAM, ANGELOPOULOS, MARIE
Year of Publication 15.12.2005
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Year of Publication 15.12.2005
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Low-activation energy silicon-containing resist system
HUANG WU-SONG, ALLEN ROBERT D, KWONG RANEE W, SOORIYAKUMARAN RATNAM, ANGELOPOULOS MARIE
Year of Publication 06.09.2005
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Year of Publication 06.09.2005
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Low-activation energy silicon-containing resist system
Huang, Wu-Song, Allen, Robert D, Angelopoulos, Marie, Kwong, Ranee W, Sooriyakumaran, Ratnam
Year of Publication 06.09.2005
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Year of Publication 06.09.2005
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SILICON-CONTAINING RESIST SYSTEM WITH CYCLIC KETAL PROTECTING GROUP
HUANG WU-SONG, ALLEN ROBERT D, KWONG RANEE W, SOORIYAKUMARAN RATNAM, ANGELOPOULOS MARIE
Year of Publication 09.06.2005
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Year of Publication 09.06.2005
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Silicon-containing photoresist systems with cyclic ketal protecting groups
HUANG WU-SONG, ALLEN ROBERT D, KWONG RANEE W, SOORIYAKUMARAN RATNAM, ANGELOPOULOS MARIE
Year of Publication 25.05.2005
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Year of Publication 25.05.2005
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Silicon-containing resist systems with cyclic ketal protecting groups
HUANG WU-SONG, ALLEN ROBERT D, KWONG RANEE W, SOORIYAKUMARAN RATNAM, ANGELOPOULOS MARIE
Year of Publication 19.05.2005
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Year of Publication 19.05.2005
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