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OPTICAL DEVICE THAT CAN ADJUST FORCE ACTION ONTO OPTICAL MODULE

OPTICAL DEVICE THAT CAN ADJUST FORCE ACTION ONTO OPTICAL MODULE

by KWAN YIM-BUN PATRICK
Year of Publication 18.12.2014

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Patent

리소그래피 장치용 광학 디바이스 및 리소그래피 장치

리소그래피 장치용 광학 디바이스 및 리소그래피 장치

by WESSELINGH JASPER, KWAN YIM BUN PATRICK
Year of Publication 22.08.2018

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Patent

OPTICAL IMAGING ARRANGEMENT WITH INDIVIDUALLY ACTIVELY SUPPORTED COMPONENTS

OPTICAL IMAGING ARRANGEMENT WITH INDIVIDUALLY ACTIVELY SUPPORTED COMPONENTS

by KWAN YIM BUN PATRICK
Year of Publication 17.04.2014

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Patent

OPTICAL IMAGING ARRANGEMENT

OPTICAL IMAGING ARRANGEMENT

by KWAN YIM BUN PATRICK
Year of Publication 07.02.2013

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Patent

VIBRATION-COMPENSATED OPTICAL SYSTEM LITHOGRAPHY APPARATUS AND METHOD

VIBRATION-COMPENSATED OPTICAL SYSTEM LITHOGRAPHY APPARATUS AND METHOD

by KWAN YIM BUN PATRICK, GROOTHUIJSEN TIM
Year of Publication 15.11.2016

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Patent

OPTICAL ELEMENT WITH LOW SURFACE FIGURE DEFORMATION

OPTICAL ELEMENT WITH LOW SURFACE FIGURE DEFORMATION

by KWAN YIM BUN PATRICK
Year of Publication 08.06.2012

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Patent

OPTICAL IMAGING ARRANGEMENT WITH MULTIPLE METROLOGY SUPPORT UNITS

OPTICAL IMAGING ARRANGEMENT WITH MULTIPLE METROLOGY SUPPORT UNITS

by KWAN YIM BUN PATRICK, RUINEMANS ERIK
Year of Publication 11.01.2016

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Patent

OPTICAL APPARATUS WITH ADJUSTABLE ACTION OF FORCE ON AN OPTICAL MODULE

OPTICAL APPARATUS WITH ADJUSTABLE ACTION OF FORCE ON AN OPTICAL MODULE

by KWAN YIM BUN PATRICK
Year of Publication 15.03.2011

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Patent

CALIBRATION OF A POSITION-MEASURING DEVICE OF AN OPTICAL DEVICE

CALIBRATION OF A POSITION-MEASURING DEVICE OF AN OPTICAL DEVICE

by KWAN YIM BUN PATRICK
Year of Publication 06.07.2010

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Patent

OPTICAL IMAGING DEVICE WITH DETERMINATION OF IMAGING ERRORS

OPTICAL IMAGING DEVICE WITH DETERMINATION OF IMAGING ERRORS

by KWAN YIM BUN PATRICK
Year of Publication 09.07.2009

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Patent

METHOD FOR CONTROLLING A MOTION OF OPTICAL ELEMENTS IN LITHOGRAPHY SYSTEMS

METHOD FOR CONTROLLING A MOTION OF OPTICAL ELEMENTS IN LITHOGRAPHY SYSTEMS

by LARO DICK ANTONIUS HENDRIKUS, KWAN YIM BUN PATRICK
Year of Publication 04.07.2014

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Patent

OPTICAL IMAGING ARRANGEMENT WITH VIBRATION DECOUPLED SUPPORT UNITS

OPTICAL IMAGING ARRANGEMENT WITH VIBRATION DECOUPLED SUPPORT UNITS

by LARO DICK ANTONIUS HENDRIKUS, KWAN YIM BUN PATRICK
Year of Publication 12.05.2014

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Patent

EUV EUV EXPOSURE APPARATUS

EUV EUV EXPOSURE APPARATUS

by HAUF MARKUS, WALTER HOLGER, HEMBACHER STEFAN, LOERING ULRICH, LAUFER TIMO, BAER NORMAN, KWAN YIM BUN PATRICK, VAN SCHOOT JAN, NATT OLIVER, WITTICH GERO, STICKEL FRANZ JOSEF, KUERZ PETER, LIMBACH GUIDO
Year of Publication 05.09.2018

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Patent

LITHOGRAPHIC APPARATUS DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY

LITHOGRAPHIC APPARATUS DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY

by KWAN YIM BUN PATRICK
Year of Publication 04.03.2002

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Patent

BALANCED POSITIONING SYSTEM FOR USE IN LITHOGRAPHIC APPARATUS

BALANCED POSITIONING SYSTEM FOR USE IN LITHOGRAPHIC APPARATUS

by KWAN YIM BUN PATRICK
Year of Publication 12.07.2001

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Patent

OPTICAL ARRANGEMENT IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

OPTICAL ARRANGEMENT IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

by MANN HANS JURGEN, KWAN YIM BUN PATRICK, EISERT FRANK, SCHOPPACH ARMIN
Year of Publication 04.07.2012

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Patent

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

by BACH FLORIAN, MAUL MANFRED, FIOLKA DAMIAN, HORN JAN, MAJOR ANDRAS G, XALTER STEFAN, EISENMENGER JOHANNES, DEGUNTHER MARKUS, KWAN YIM BUN PATRICK, WANGLER JOHANNES, LAYH MICHAEL, PATRA MICHAEL
Year of Publication 08.05.2014

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MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

by BACH FLORIAN, KWAN YIM BUN PATRICK, BLEIDISTEL SASCHA, WALDIS SEVERIN, BENZ DANIEL, WERBER ARMIN
Year of Publication 14.06.2011

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Patent

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

by BACH FLORIAN, KWAN YIM BUN PATRICK, BLEIDISTEL SASCHA, WALDIS SEVERIN, BENZ DANIEL, WERBER ARMIN
Year of Publication 26.05.2011

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Patent

DIAPHRAGM CHANGING DEVICE

DIAPHRAGM CHANGING DEVICE

by WILL MARCUS, BISCHOFF THOMAS, BIEG HERMANN, XALTER STEFAN, NGUYEN UY LIEM, KWAN YIM BUN PATRICK, MUEHLBEYER MICHAEL
Year of Publication 13.08.2012

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