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"KWAK, SUNG DON"
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"KWAK, SUNG DON"
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WAFER HOLDER CLEANING APPARATUS AND FILM DEPOSITION SYSTEM
by
KIM, CHOO HO
,
JI, WON SOO
,
BANG, SANG KYU
,
KWAK
,
SUNG DON
Year of Publication
22.05.2014
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SLIT VALVE UNIT AND FILM FORMING APPARATUS HAVING THE SAME
by
KIM, CHOO HO
,
JI, WON SOO
,
BANG, SANG KYU
,
KWAK
,
SUNG DON
Year of Publication
24.04.2014
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WAFER HOLDER CLEANING APPARATUS AND FILM DEPOSITION SYSTEM INCLUDING THE SAME
by
JI WON SOO
,
BANG SANG KYU
,
KWAK SUNG DON
,
KIM CHOO HO
Year of Publication
10.09.2015
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Slit valve unit and film forming apparatus having the same
by
JI WON SOO
,
BANG SANG KYU
,
KWAK SUNG DON
,
KIM CHOO-HO
Year of Publication
26.08.2014
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WAFER HOLDER CLEANING APPARATUS AND FILM DEPOSITION SYSTEM INCLUDING THE SAME
by
JI WON SOO
,
BANG SANG KYU
,
KWAK SUNG DON
,
KIM CHOO HO
Year of Publication
15.05.2014
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SLIT VALVE UNIT AND FILM FORMING APPARATUS HAVING THE SAME
by
JI WON SOO
,
BANG SANG KYU
,
KWAK SUNG DON
,
KIM CHOO-HO
Year of Publication
17.04.2014
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Patent
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