Fabrication of a spiral microcoil using a 3D-LIGA process
MEKARU, Harutaka, KUSUMI, Shinji, SATO, Noriaki, SHIMIZU, Masami, YAMASHITA, Michiru, SHIMADA, Osamu, HATTORI, Tadashi
Published in Microsystem technologies (01.02.2007)
Published in Microsystem technologies (01.02.2007)
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Conference Proceeding
Journal Article
Design of solenoidal electromagnetic microactuator utilizing 3D X-ray lithography and metalization
MOCHIZUKI, Hiroaki, MEKARU, Harutaka, KUSUMI, Shinji, SATO, Noriaki, SHIMIZU, Masami, YAMASHITA, Michiru, SHIMADA, Osamu, HATTORI, Tadashi
Published in Microsystem technologies (01.03.2007)
Published in Microsystem technologies (01.03.2007)
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Conference Proceeding
Journal Article
Fabrication of Spiral Micro-Coil Utilizing LIGA Process
SHIMADA, Osamu, KUSUMI, Shinji, MEKARU, Harutaka, SATO, Noriaki, SHIMIZU, Masami, YAMASHITA, Michiru, HATTORI, Tadashi
Published in JSME International Journal Series A Solid Mechanics and Material Engineering (01.01.2006)
Published in JSME International Journal Series A Solid Mechanics and Material Engineering (01.01.2006)
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Journal Article
Fabrication of mold master for spiral micro-coil utilizing X-ray lithography of synchrotron radiation
Mekaru, H., Kusumi, S., Sato, N., Yamashita, M., Shimada, O., Hattori, T.
Published in Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference (2003)
Published in Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference (2003)
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Conference Proceeding