Deposition of SiO2 and Ta2O5 films by electron-beam-excited plasma ion plating
Toki, Kazuyuki, Kusakabe, Kazutoshi, Odani, Tadayoshi, Kobuna, Sadatoshi, Shimizu, Yasushi
Published in Thin solid films (01.08.1996)
Published in Thin solid films (01.08.1996)
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